NITRIDE PIEZOELECTRIC BODY AND MEMS DEVICE USING SAME

Title:

NITRIDE PIEZOELECTRIC BODY AND MEMS DEVICE USING SAME

Document Type and Number:

WIPO Patent Application WO/2020/170610

Kind Code:

A1

Abstract:

[Problem] The purpose of the present invention is to provide a piezoelectric body that has higher performance indexes (d33, e33, C33, g33, k2) than aluminum nitride to which no element is added. [Solution] The present invention is represented by chemical formula Al1 – X – YMgXMYN, wherein (X + Y) is less than 1, X is more than 0 but less than 1, and Y is more than 0 but less than 1.

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Inventors:

HIRATA KENJI (JP)
YAMADA HIROSHI (JP)
UEHARA MASATO (JP)
ANGGRAINI SRI AYU (JP)
AKIYAMA MORITO (JP)

Application Number:

PCT/JP2019/051419

Publication Date:

August 27, 2020

Filing Date:

December 27, 2019

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Assignee:

AIST (JP)

International Classes:

C01B21/072; H01L41/09; H01L41/113; H01L41/187

Domestic Patent References:

WO2016111280A1

2016-07-14

Foreign References:

JP2006124268A	2006-05-18
JP2013148562A	2013-08-01
JP2015233042A	2015-12-24
JP2009010926A	2009-01-15

Other References:

M. UEHARAH. SHIGEMOTOY. FUJIOT. NAGASEY. AIDAK. UMEDAM. AKIYAMA, APPL. PHYS. LETT., vol. 111, 2017, pages 112901
See also references of EP 3865456A4

Attorney, Agent or Firm:

TAKAMATSU Takayuki et al. (JP)

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