Title:
NITROGEN HEATING UNIT
Document Type and Number:
WIPO Patent Application WO/2015/141602
Kind Code:
A1
Abstract:
[Problem] To provide a nitrogen heating unit capable of preventing the coagulation and deposition of a sublimation material and capable of being installed with ease in already-operating facilities. [Solution] Provided is a nitrogen heating unit (1) comprising: a first cylindrical tube (12) into which room temperature nitrogen gas is introduced from a nitrogen gas supply unit (30) for dilution; a heating container (11) connected to the first cylindrical tube and provided with a heating unit (14) located on an axis of the inner space of the heating container (11); and a second cylindrical tube (13) for discharging the heated nitrogen gas, the second cylindrical tube (13) being connected to the heating container. The nitrogen heating unit (1) is installed on a nitrogen gas supply path from the nitrogen gas supply unit to a dry vacuum pump (31).
Inventors:
UEDA MINORU (JP)
OGAWA TAKAHIRO (JP)
OGAWA TAKAHIRO (JP)
Application Number:
PCT/JP2015/057602
Publication Date:
September 24, 2015
Filing Date:
March 16, 2015
Export Citation:
Assignee:
TECNOS COMPANY LTD (JP)
International Classes:
H01L21/3065; F04B37/16
Foreign References:
| JPS63264118A | 1988-11-01 | |||
| JPS6232619A | 1987-02-12 | |||
| JP2001176854A | 2001-06-29 |
Attorney, Agent or Firm:
MORISADA Yuji (JP)
森定 Yuji (JP)
森定 Yuji (JP)
Download PDF:
Previous Patent: IMAGE DISPLAY ELEMENT
Next Patent: METAL COMPLEX AND LIGHT-EMITTING ELEMENT USING SAME
Next Patent: METAL COMPLEX AND LIGHT-EMITTING ELEMENT USING SAME