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Title:
NON-CONTACT CONVEYING DEVICE USING VACUUM PAD
Document Type and Number:
WIPO Patent Application WO/2011/152587
Kind Code:
A1
Abstract:
The present invention includes: a non-contact plate mounted in parallel to the top surface of an object to convey at the bottom surface thereof; an attractive force generating section and a repulsive force generating section disposed in the non-contact plate for simultaneously generating attractive force and generating repulsive force towards the object to transfer by discharged fluid, so that, when transferring the object without contact, the object to transfer may be conveyed without an inclination to any one side but in the state to be parallel with the non-contact plate; and a transferring means mounted in the non-contact plate to be positioned between the arrangements of the attractive force generating section and the repulsive force generating section so as to prevent interference with the generation of the attractive force of the attractive force generating section and the repulsive force of the repulsive force generating section, wherein the transferring means transfers the object without any contact with the discharged fluid.

Inventors:
KIM YOUNG-TAE (KR)
CHANG YOUNG-BAE (US)
Application Number:
PCT/KR2010/004314
Publication Date:
December 08, 2011
Filing Date:
July 02, 2010
Export Citation:
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Assignee:
KIM YOUNG-TAE (KR)
CHANG YOUNG-BAE (US)
International Classes:
H01L21/677; B65G49/06; B65G51/03; G02F1/13
Domestic Patent References:
WO2002047155A12002-06-13
Foreign References:
JP2006264804A2006-10-05
KR20070109222A2007-11-15
KR20070037741A2007-04-06
KR20100058149A2010-06-03
Attorney, Agent or Firm:
LEE, SUN-KUK (KR)
이순국 (KR)
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Claims: