Title:
NON-EVAPORATIVE GETTER-COATED COMPONENT, CONTAINER, MANUFACTURING METHOD, AND APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/097325
Kind Code:
A1
Abstract:
Provided are a component and a container, which are coated with a non-evaporative getter, the component and the container being characterized by including: a non-evaporative getter material layer containing a total of 20 mole% or less of occluded carbon atoms, nitrogen atoms, and oxygen atoms; and/or a noble metal layer containing a total of 20 mole% or less of occluded carbon atoms, nitrogen atoms, and oxygen atoms. Also provided is a method for manufacturing a non-evaporative getter-coated component and container, the method being characterized by comprising a step for forming a non-evaporative getter material layer and/or a noble metal layer by coating the component and container with a non-evaporative getter material and/or a noble metal by a vapor deposition process under low-pressure conditions. Also provided is an apparatus for manufacturing an NEG-coated component and container, the apparatus being characterized by having an NEG material filament and/or a noble metal filament, as well as a current terminal.
Inventors:
MASE KAZUHIKO (JP)
KIKUCHI TAKASHI (JP)
KIKUCHI TAKASHI (JP)
Application Number:
PCT/JP2017/042682
Publication Date:
May 31, 2018
Filing Date:
November 28, 2017
Export Citation:
Assignee:
INTER UNIV RESEARCH INSTITUTE CORPORATION HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION (JP)
International Classes:
F04B37/04; F04B37/02
Foreign References:
| JP2008532756A | 2008-08-21 | |||
| JP2001503830A | 2001-03-21 | |||
| JPH0536078U | 1993-05-18 | |||
| JP4451498B2 | 2010-04-14 |
Other References:
C. BENVENUTI ET AL., VACUUM, vol. 50, 1998, pages 57
C. BENVENUTI ET AL., VACUUM, vol. 60, 2001, pages 57
C. BENVENUTI ET AL., VACUUM, vol. 73, 2004, pages 139
C. BENVENUTI ET AL., VACUUM, vol. 60, 2001, pages 57
C. BENVENUTI ET AL., VACUUM, vol. 73, 2004, pages 139
Attorney, Agent or Firm:
SUGIMURA Kenji (JP)
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