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Title:
NON-PLANAR MICRO-OPTICAL STRUCTURES
Document Type and Number:
WIPO Patent Application WO1999052647
Kind Code:
B1
Abstract:
In one embodiment, the present invention provides a microlens having very small focal length. The present invention also provides a non-planar microstructure having a covering layer which is slowly oxidizing or substantially free of oxygen. The present invention also provides methods for forming such microlenses and microstructures. In addition, the present invention provides a VCSEL which includes one or more non-planar microstructures of the present invention.

Inventors:
PEAKE GREGORY
HERSEE STEPHEN
SARAGAN ANDREW
Application Number:
PCT/US1999/008279
Publication Date:
December 02, 1999
Filing Date:
April 15, 1999
Export Citation:
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Assignee:
UNIV NEW MEXICO (US)
International Classes:
B29D11/00; C23C16/04; G02B3/00; G02B6/124; H01L31/0232; H01S5/026; H01S5/183; G02B6/12; H01S3/00; H01S5/10; (IPC1-7): B05D1/32; B29D11/00; G02B27/10; G02B6/32; G02F1/33; H01L29/20; H01L31/0232; H01S3/08
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