Title:
NON-VOLATILE MEMORY ELEMENT AND NON-VOLATILE MEMORY DEVICE EQUIPPED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2011/155210
Kind Code:
A1
Abstract:
Disclosed are: a non-volatile memory element in which the voltage of an electric pulse necessary for initial brake down can be reduced and the fluctuation in resistivity values can also be reduced; and a non-volatile memory device equipped with the non-volatile memory element. The non-volatile memory element comprises a first electrode (103), a second electrode (105), and a resistance-varying layer (104) which is intercalated between the first electrode (103) and the second electrode (105) and in which the resistivity value can vary reversibly depending on an electric signal delivered between the first electrode (103) and the second electrode (105), wherein the resistance-varying layer (104) comprises a first region (106) which is in contact with the first electrode (103) and contains an oxygen-deficient transition metal oxide and a second region (107) which is in contact with the second electrode (105) and contains a transition metal oxide having a smaller degree of oxygen deficiency than that of the first region (106). The second electrode (105) is composed of an alloy of iridium and at least one noble metal having a lower Young's modulus than that of iridium, and has an iridium content of 50 atm% or more.
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Inventors:
YONEDA, Shinichi (())
米田 慎一 (())
MIKAWA, Takumi (())
三河 巧 (())
米田 慎一 (())
MIKAWA, Takumi (())
三河 巧 (())
Application Number:
JP2011/003270
Publication Date:
December 15, 2011
Filing Date:
June 09, 2011
Export Citation:
Assignee:
PANASONIC CORPORATION (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
YONEDA, Shinichi (())
米田 慎一 (())
MIKAWA, Takumi (())
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
YONEDA, Shinichi (())
米田 慎一 (())
MIKAWA, Takumi (())
International Classes:
H01L27/105; C23C14/06; G11C13/00; H01L45/00; H01L49/00
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (3rd Fl, Bo-eki Bldg. 123-1 Higashimachi, Chuo-ku, Kobe-sh, Hyogo 31, 〒6500031, JP)
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