Title:
NON-VOLATILE STORAGE ELEMENT AND ANALOG CIRCUIT PROVIDED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2019/069377
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide: a non-volatile storage element having excellent charge retention characteristics to be able to reduce variation in electric characteristics; and an analog circuit provided with the non-volatile storage element. This non-volatile storage element M is provided with: a charge retention region (21); and an insulator (20) that surrounds the entire surface of the charge retention region (21) and that has halogen distributed in at least a portion of a region surrounding the entire surface.
Inventors:
SAKAMOTO TOSHIRO (JP)
TAKEHARA SATOSHI (JP)
YAMAHA YOSHIRO (JP)
KOBAYASHI MAKOTO (JP)
TAKEHARA SATOSHI (JP)
YAMAHA YOSHIRO (JP)
KOBAYASHI MAKOTO (JP)
Application Number:
PCT/JP2017/036017
Publication Date:
April 11, 2019
Filing Date:
October 03, 2017
Export Citation:
Assignee:
ASAHI KASEI MICRODEVICES CORP (JP)
International Classes:
H01L27/11521
Foreign References:
| JPH05206412A | 1993-08-13 | |||
| JP2016129293A | 2016-07-14 | |||
| JP2007142450A | 2007-06-07 | |||
| JP2007294846A | 2007-11-08 | |||
| JPH0465546B2 | 1992-10-20 | |||
| JP2002368107A | 2002-12-20 | |||
| JP2013246627A | 2013-12-09 |
Other References:
See also references of EP 3693995A4
Attorney, Agent or Firm:
MORI Tetsuya et al. (JP)
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