Title:
NON-VOLATILE STORAGE ELEMENT, NON-VOLATILE STORAGE DEVICE, AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2012/073503
Kind Code:
A1
Abstract:
A non-volatile storage element (10) according to the present invention is provided with: a first metal wire (103); a plug (107) which is formed on the first metal wire (103) and is connected to the first metal wire (103); a layered body (150) which includes a first electrode (108), a second electrode (111), and a variable resistance layer (113), and is formed on the plug (107) with the plug (107) being connected to the first electrode (108); a second metal wire (119) which is formed on the layered body (150) and is directly connected to the second electrode (111); and a side-wall protective layer (115) which covers the side walls of the layered body (150) and has insulation and oxygen barrier properties. Part of the lower surface of the second metal wire (119) is disposed below the upper surface of the layered body (150).
Inventors:
HIMENO ATSUSHI
SORADA HARUYUKI
HAYAKAWA YUKIO
MIKAWA TAKUMI
SORADA HARUYUKI
HAYAKAWA YUKIO
MIKAWA TAKUMI
Application Number:
PCT/JP2011/006693
Publication Date:
June 07, 2012
Filing Date:
November 30, 2011
Export Citation:
Assignee:
PANASONIC CORP (JP)
HIMENO ATSUSHI
SORADA HARUYUKI
HAYAKAWA YUKIO
MIKAWA TAKUMI
HIMENO ATSUSHI
SORADA HARUYUKI
HAYAKAWA YUKIO
MIKAWA TAKUMI
International Classes:
H01L27/105; H01L45/00; H01L49/00
Domestic Patent References:
| WO2008155832A1 | 2008-12-24 | |||
| WO2010079816A1 | 2010-07-15 | |||
| WO2010119671A1 | 2010-10-21 | |||
| WO2008149484A1 | 2008-12-11 | |||
| WO2007102483A1 | 2007-09-13 | |||
| WO2008132899A1 | 2008-11-06 |
Foreign References:
| JP2010232214A | 2010-10-14 |
Attorney, Agent or Firm:
NII, Hiromori (JP)
New house Extensive 守 (JP)
New house Extensive 守 (JP)
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Claims: