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Title:
NON-VOLATILE STORAGE ELEMENT AND NON-VOLATILE STORAGE DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/080452
Kind Code:
A1
Abstract:
This non-volatile storage element is equipped with: a first electrode (103); a second electrode (106); and a variable resistance layer (104) that comprises metal oxides and is formed between the first electrode (103) and the second electrode (106). The variable resistance layer (104) includes: a first oxide layer (104a) that is provided on the first electrode (103) and has a resistivity of ρx; a second oxide layer (104b) that is provided on the first oxide layer (104a) and has a resistivity of ρy (where ρx <ρy); a third oxide layer (104c) that is provided on the second oxide layer (104b) and has a resistivity of ρz (where ρy <ρz); and a local region (105) that is provided inside the third oxide layer and the second oxide layer (104b) so as to come into contact with the second electrode (106) without coming into contact with the first oxide layer (104a), and has a resistivity that is lower than that of the third oxide layer (104c) and is different from the resistivity of the second oxide layer (104b).

Inventors:
WEI ZHIQIANG
NINOMIYA TAKEKI
TAKAGI TAKESHI
Application Number:
PCT/JP2012/007162
Publication Date:
June 06, 2013
Filing Date:
November 08, 2012
Export Citation:
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Assignee:
PANASONIC CORP (JP)
International Classes:
H01L27/105; H01L45/00; H01L49/00
Domestic Patent References:
WO2010038423A12010-04-08
WO2012066787A12012-05-24
WO2012042866A12012-04-05
Foreign References:
JP2010251352A2010-11-04
JP2008306157A2008-12-18
Attorney, Agent or Firm:
NII, Hiromori (JP)
New house Extensive 守 (JP)
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Claims: