Title:
NORMAL-OPEN METAL DIAPHRAGM CONTROL VALVE DRIVEN BY PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2007/083439
Kind Code:
A1
Abstract:
A normal-open metal diaphragm control valve driven by a piezoelectric element, capable
of accurate and stable flow rate control even under high temperature environments
and enabling adjustment of a compressive force applied to the piezoelectric element
to be made without disassembling the control valve. Specifically, the control
valve has a body (7) in which a valve chamber (7a’) and a valve seat (7c)
are formed, a metal diaphragm (8) disposed in the valve chamber (7a’) and
abutted to and separated from the valve seat (7c), an actuator box (10) secured to
the body (7), the piezoelectric element (13) disposed in the actuator box (10) and
extended downward by application of a voltage thereto to press the metal diaphragm (8)
through a metal diaphragm retainer (12), a disc spring mechanism (14) for absorbing
the extension of the piezoelectric element (13) when the metal diaphragm (8)
abuts to the valve seat (7c) and applying a predetermined pressure to the valve seat
(7c), and a preload mechanism (21) always applying an upward compressive force
to the piezoelectric element (13) and capable of adjusting the compressive force
applied to the piezoelectric element (13) from the outside.
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Inventors:
MATSUMOTO ATSUSHI (JP)
HIRATA KAORU (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
HIRATA KAORU (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
Application Number:
PCT/JP2006/323050
Publication Date:
July 26, 2007
Filing Date:
November 13, 2006
Export Citation:
Assignee:
FUJIKIN KK (JP)
MATSUMOTO ATSUSHI (JP)
HIRATA KAORU (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
MATSUMOTO ATSUSHI (JP)
HIRATA KAORU (JP)
DOHI RYOUSUKE (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
International Classes:
F16K31/02; F16K7/14
Foreign References:
| JP2004197754A | 2004-07-15 | |||
| JP2005149075A | 2005-06-09 | |||
| JP2003120832A | 2003-04-23 | |||
| JPH10275018A | 1998-10-13 | |||
| JPS56105177A | 1981-08-21 | |||
| JPH07310842A | 1995-11-28 | |||
| JP2004197754A | 2004-07-15 | |||
| JPH02203087A | 1990-08-13 |
Attorney, Agent or Firm:
SUGIMOTO, Takeo (1-21 Kitahama 2-chome, Chuo-k, Osaka-shi Osaka, JP)
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