Title:
NOVEL BIFUNCTIONAL (METH)ACRYLATE COMPOUND AND POLYMER
Document Type and Number:
WIPO Patent Application WO/2019/171957
Kind Code:
A1
Abstract:
Provided is a compound that can be used as a resist resin, etc., having excellent sensitivity, resolution, and etching resistance via a compound represented by formula (1) (wherein R1 represents a hydrogen atom or a methyl group, R2 represents an aliphatic hydrocarbon group comprising from 1 to 6 carbon atoms, inclusive, m represents an integer from 0 to 5, inclusive, and n represents an integer from 0 to 4, inclusive).
Inventors:
KAKUTA SATOSHI (JP)
BABA HIROMITSU (JP)
IKEDA TERUYO (JP)
FUJISAWA RYO (JP)
HABA KAZUHIKO (JP)
BABA HIROMITSU (JP)
IKEDA TERUYO (JP)
FUJISAWA RYO (JP)
HABA KAZUHIKO (JP)
Application Number:
PCT/JP2019/006340
Publication Date:
September 12, 2019
Filing Date:
February 20, 2019
Export Citation:
Assignee:
MARUZEN PETROCHEM CO LTD (JP)
International Classes:
C08F20/40; C07C69/54; G03F7/004; G03F7/027
Domestic Patent References:
| WO2017209161A1 | 2017-12-07 |
Foreign References:
| JP2010522893A | 2010-07-08 | |||
| JP2017226616A | 2017-12-28 | |||
| JP2017003920A | 2017-01-05 | |||
| JP2002148816A | 2002-05-22 |
Other References:
DEHMLOW, ECKEHARD V. ET AL.: "Notiz zur Beschleunigung von Umsetzungen zwischen Alkinen and Carbonylverbindungen", LIEBIGS ANNALEN DER CHEMIE, 17 September 1982 (1982-09-17), pages 1750 - 1752, XP009523176, ISSN: 0170-2041
CHEMICAL ABSTRACTS, Columbus, Ohio, US; abstract no. 1234827-45-2
See also references of EP 3763752A4
CHEMICAL ABSTRACTS, Columbus, Ohio, US; abstract no. 1234827-45-2
See also references of EP 3763752A4
Attorney, Agent or Firm:
THE PATENT CORPORATE BODY OF ONO & CO. (JP)
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