Title:
NOVEL COMPOUND, POLYMER AND RADIATION-SENSITIVE RESIN COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2006/121096
Kind Code:
A1
Abstract:
Disclosed is a radiation-sensitive resin composition which is highly transparent to radiation while being excellent in basic physical properties of a resist such as sensitivity, resolution and pattern shape. This radiation-sensitive resin composition is particularly high in resolution, large in DOF and excellent in LER. Also disclosed are a polymer applicable to such a composition, and a novel compound used for synthesizing such a polymer. This novel compound is represented by the following formula (2). (2) In the formula (2), R4 represents a methyl group, a trifluoromethyl group or a hydrogen atom; at least one of Rf's represents a fluorine atom, or a straight chain or branched perfluoroalkyl group having 1-10 carbon atoms; A represents a divalent organic group or a single bond; G represents a divalent organic group containing a fluorine atom or a single bond; Mm+ represents a metal ion or an onium cation; m represents a natural number of 1-3; and p represents a natural number of 1-8.
Inventors:
NAGAI TOMOKI
YONEDA EIJI
EBATA TAKUMA
KAWAKAMI MINENORI
SUGIURA MAKOTO
SHIMOKAWA TSUTOMU
SHIMIZU MAKOTO
YONEDA EIJI
EBATA TAKUMA
KAWAKAMI MINENORI
SUGIURA MAKOTO
SHIMOKAWA TSUTOMU
SHIMIZU MAKOTO
Application Number:
PCT/JP2006/309446
Publication Date:
November 16, 2006
Filing Date:
May 11, 2006
Export Citation:
Assignee:
JSR CORP (JP)
NAGAI TOMOKI
YONEDA EIJI
EBATA TAKUMA
KAWAKAMI MINENORI
SUGIURA MAKOTO
SHIMOKAWA TSUTOMU
SHIMIZU MAKOTO
NAGAI TOMOKI
YONEDA EIJI
EBATA TAKUMA
KAWAKAMI MINENORI
SUGIURA MAKOTO
SHIMOKAWA TSUTOMU
SHIMIZU MAKOTO
International Classes:
C07C309/10; C07C309/12; C07C309/19; C07C309/20; C07C381/12; C07D209/76; C08F20/38; C08F28/02; C08F220/12; C08L33/04; C08L41/00; G03F7/039; H01L21/027
Foreign References:
| JPH11502543A | 1999-03-02 | |||
| JP2003525957A | 2003-09-02 | |||
| JPH06509811A | 1994-11-02 | |||
| JPS4827906B1 | 1973-08-27 | |||
| US4421889A | 1983-12-20 | |||
| EP0699726A2 | 1996-03-06 | |||
| JPH08325475A | 1996-12-10 | |||
| JP2002201232A | 2002-07-19 | |||
| JP2002145955A | 2002-05-22 | |||
| JPH10221852A | 1998-08-21 | |||
| JP2003173026A | 2003-06-20 | |||
| JP2004062154A | 2004-02-26 | |||
| US20040072094A1 | 2004-04-15 |
Other References:
COWIE J.M.G. ET AL.: "Novel single ion, comb-branched polymer electrolytes", SOLID STATE IONICS, vol. 123, no. 1-4, August 1999 (1999-08-01), pages 233 - 242, XP004172934
See also references of EP 1897869A4
See also references of EP 1897869A4
Attorney, Agent or Firm:
Waki, Misao (Toin-cho Inabe-gun, Mie 33, JP)
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