Title:
NOVEL COMPOUND, THIN FILM-FORMING MATERIAL THAT CONTAINS SAID COMPOUND, AND THIN FILM MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2021/085210
Kind Code:
A1
Abstract:
This thin film-forming material contains a compound represented by formula (1). (In formula (1), R1-R5 are each independently a hydrogen atom, an alkyl group having 1-5 carbon atoms, or a group including a fluorine atom, M represents a metal atom, and n represents the valence of the metal atom represented by M. However, at least one of R2, R3, and R4 represents a group including a fluorine atom.)
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Inventors:
SAKURAI ATSUSHI (JP)
HATASE MASAKO (JP)
ENZU MASAKI (JP)
TAKEDA KEISUKE (JP)
FUKUSHIMA RYOTA (JP)
YAMASHITA ATSUSHI (JP)
HATASE MASAKO (JP)
ENZU MASAKI (JP)
TAKEDA KEISUKE (JP)
FUKUSHIMA RYOTA (JP)
YAMASHITA ATSUSHI (JP)
Application Number:
PCT/JP2020/039239
Publication Date:
May 06, 2021
Filing Date:
October 19, 2020
Export Citation:
Assignee:
ADEKA CORP (JP)
International Classes:
C07F1/08; C07F3/06; C07F7/22; C07F15/06; C23C16/18; H01L21/285
Foreign References:
| RU2146260C1 | 2000-03-10 | |||
| JP2009503247A | 2009-01-29 | |||
| CN101274939A | 2008-10-01 | |||
| US20120308739A1 | 2012-12-06 |
Other References:
JESPERSEN, HENRIK T. ET AL.: "Supercritical fluids applied to the sol-gel process for preparation of AEROMOSILS/palladium particle nanocomposite catalyst", JOURNAL OF SUPERCRITICAL FLUIDS, vol. 46, no. 2, 2008, pages 178 - 184, XP023316168, DOI: 10.1016/j.supflu.2008.04.013
KUCHEROV A., FINASHINA E., KRAMAREVA N., ROGACHEVA V., ZEZIN A., SAID-GALIYEV E., KUSTOV L.: "Comparative study of Cu(II) catalytic sites immobilized onto different polymeric supports", MACROMOLECULAR SYMPOSIA, vol. 204, no. 1, 2003, pages 175 - 189, XP055821999
BOZBAG S. E., UNAL U., KURYKIN M. A., AYALA C. J., AINDOW M., ERKEY C.: "Thermodynamic Control of Metal Loading and Composition of Carbon Aerogel Supported Pt-Cu Alloy Nanoparticles by Supercritical Deposition", JOURNAL OF PHYSICAL CHEMISTRY C, vol. 117, no. 13, 2013, pages 6777 - 6787, XP055822002
BUKALOV SERGEY S; AYSIN RINAT R; LEITES LARISSA A; KURYKIN MIKHAIL A; KHRUSTALEV VICTOR N: "Non-rigid molecule of copper(II) diiminato Cu[CF3C(NH)C(F)C(NH)CF3]2, its conformational polymorphism in crystal and structure in solutions (Raman, UV-vis and quantum chemistry study", JOURNAL OF MOLECULAR STRUCTURE, vol. 1098, 2015, pages 246 - 254, XP029259901
SHREIDER, V. A.: "Electrochemical synthesis and properties of some metal perfluoro- beta -diketodiiminates", INORGANICA CHIMICA ACTA, vol. 64, no. 3, 1982, pages L101 - L103, XP000961570, DOI: 10.1016/S0020-1693(00)90292-5
KUCHEROV A., FINASHINA E., KRAMAREVA N., ROGACHEVA V., ZEZIN A., SAID-GALIYEV E., KUSTOV L.: "Comparative study of Cu(II) catalytic sites immobilized onto different polymeric supports", MACROMOLECULAR SYMPOSIA, vol. 204, no. 1, 2003, pages 175 - 189, XP055821999
BOZBAG S. E., UNAL U., KURYKIN M. A., AYALA C. J., AINDOW M., ERKEY C.: "Thermodynamic Control of Metal Loading and Composition of Carbon Aerogel Supported Pt-Cu Alloy Nanoparticles by Supercritical Deposition", JOURNAL OF PHYSICAL CHEMISTRY C, vol. 117, no. 13, 2013, pages 6777 - 6787, XP055822002
BUKALOV SERGEY S; AYSIN RINAT R; LEITES LARISSA A; KURYKIN MIKHAIL A; KHRUSTALEV VICTOR N: "Non-rigid molecule of copper(II) diiminato Cu[CF3C(NH)C(F)C(NH)CF3]2, its conformational polymorphism in crystal and structure in solutions (Raman, UV-vis and quantum chemistry study", JOURNAL OF MOLECULAR STRUCTURE, vol. 1098, 2015, pages 246 - 254, XP029259901
SHREIDER, V. A.: "Electrochemical synthesis and properties of some metal perfluoro- beta -diketodiiminates", INORGANICA CHIMICA ACTA, vol. 64, no. 3, 1982, pages L101 - L103, XP000961570, DOI: 10.1016/S0020-1693(00)90292-5
Attorney, Agent or Firm:
SOGA, Michiharu et al. (JP)
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