Title:
NOVEL ONIUM SALT AND PHOTOACID GENERATOR
Document Type and Number:
WIPO Patent Application WO/2021/251035
Kind Code:
A1
Abstract:
The present invention functions as a photoacid generator; and this photoacid generator provides a chemically amplified photoresist composition by being combined with a component that is a resin, the solubility of which in an alkali is increased by the action of an acid that is generated when irradiated with an active energy ray such as an electron beam or light, or the like. The present invention is an onium salt which is represented by general formula (1), wherein among two kinds of isomers of an anion structure, namely among facial isomers and meridional isomers, the proportion of the facial isomers is 15.0% by weight or less. (1): ((R2)n+1-E)+ ((R1)3(F)3P)-
Inventors:
AKAZAWA YOSHIHIKO (JP)
KIZU TOMOHITO (JP)
TAKAHASHI RYOSUKE (JP)
NAKAMURA YUJI (JP)
KIMURA HIDEKI (JP)
KIZU TOMOHITO (JP)
TAKAHASHI RYOSUKE (JP)
NAKAMURA YUJI (JP)
KIMURA HIDEKI (JP)
Application Number:
PCT/JP2021/017492
Publication Date:
December 16, 2021
Filing Date:
May 07, 2021
Export Citation:
Assignee:
SAN APRO LTD (JP)
International Classes:
C07C25/18; C07C381/12; C07F9/535; C09K3/00; G03F7/004; G03F7/038; G03F7/039
Domestic Patent References:
| WO2019225185A1 | 2019-11-28 | |||
| WO2005116038A1 | 2005-12-08 |
Foreign References:
| JP2019073470A | 2019-05-16 | |||
| JP2016042127A | 2016-03-31 | |||
| JP2012027290A | 2012-02-09 | |||
| JP2004533473A | 2004-11-04 | |||
| JP2004189673A | 2004-07-08 | |||
| JP2002193925A | 2002-07-10 | |||
| JP2001354669A | 2001-12-25 | |||
| JP2004533473A | 2004-11-04 | |||
| JPS6445357A | 1989-02-17 | |||
| JPS61212554A | 1986-09-20 | |||
| JPS61100557A | 1986-05-19 | |||
| JPH054996A | 1993-01-14 | |||
| JPH0782244A | 1995-03-28 | |||
| JPH0782245A | 1995-03-28 | |||
| JPS58210904A | 1983-12-08 | |||
| JPH06184170A | 1994-07-05 |
Other References:
"Shin Jikken Kagaku Koza", vol. 14-111, 1978, MARUZEN, pages: 1838 - 1846
ADVANCE IN POLYMER SCIENCE, vol. 62, 1984, pages 1 - 48
KAGAKU DOJIN: "Synthesis Reaction Edition", 1982, article "Yuki Iou Kagaku", pages: 237 - 280
ADVANCE IN POLYMER SCIENCE, vol. 62, 1984, pages 1 - 48
KAGAKU DOJIN: "Synthesis Reaction Edition", 1982, article "Yuki Iou Kagaku", pages: 237 - 280
Attorney, Agent or Firm:
HAYASHI Hiroshi (JP)
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