Title:
NOVEL RUTHENIUM COMPOUND, PREPARATION METHOD THEREFOR, PRECURSOR COMPOSITION FOR FILM DEPOSITION, CONTAINING SAME, AND METHOD FOR DEPOSITING FILM BY USING SAME
Document Type and Number:
WIPO Patent Application WO/2015/182946
Kind Code:
A1
Abstract:
The present invention relates to: a novel ruthenium compound; a method for preparing the ruthenium compound; a precursor composition for depositing a ruthenium-containing film, containing the ruthenium compound; and a method for depositing a ruthenium-containing film by using the precursor composition.
Inventors:
HAN WON SEOK (KR)
KIM SO YOUNG (KR)
KOH WONYONG (KR)
KIM SO YOUNG (KR)
KOH WONYONG (KR)
Application Number:
PCT/KR2015/005232
Publication Date:
December 03, 2015
Filing Date:
May 26, 2015
Export Citation:
Assignee:
UP CHEMICAL CO LTD (KR)
International Classes:
C07F15/00; C23C16/06; C23C16/18; C23C16/44
Foreign References:
| KR20100060482A | 2010-06-07 | |||
| KR20130043557A | 2013-04-30 | |||
| KR20140131219A | 2014-11-12 | |||
| KR20090082543A | 2009-07-31 | |||
| KR20120085892A | 2012-08-01 | |||
| KR20120012319A | 2012-02-09 |
Attorney, Agent or Firm:
MAPS Intellectual Property Law Firm (KR)
특허법인 엠에이피에스 (KR)
특허법인 엠에이피에스 (KR)
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