Title:
NOZZLE AND LIQUID SUPPLY DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/147440
Kind Code:
A1
Abstract:
A nozzle according to an embodiment of the present invention is provided with a body. The body has, provided therein, a supply port through which a liquid is supplied, a discharge port through which the liquid is discharged downwards, and a flow path extending between the supply port and the discharge port. The flow path is provided with: a storage section including a first portion in which the liquid heading towards the discharge port flows downwards, and a second portion which is provided downstream of the first portion, and in which the liquid heading towards the discharge port flows upwards; and an exhaust section which is capable of discharging gas located upstream of the second section, when the liquid is in a state of not being discharged from the discharge port, and being stored in the storage section.
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Inventors:
TERADA TAKAHIRO (JP)
TANAKA MASAYUKI (JP)
KATO SHIGUMA (JP)
DEURA KAORI (JP)
MACHIDA MORIHIRO (JP)
TANAKA MASAYUKI (JP)
KATO SHIGUMA (JP)
DEURA KAORI (JP)
MACHIDA MORIHIRO (JP)
Application Number:
PCT/JP2015/075511
Publication Date:
September 22, 2016
Filing Date:
September 08, 2015
Export Citation:
Assignee:
TOSHIBA KK (JP)
International Classes:
H01L21/027; B05C5/00; B05C11/08
Foreign References:
| JP2005277211A | 2005-10-06 | |||
| JP2013243262A | 2013-12-05 | |||
| JP2010020014A | 2010-01-28 | |||
| JP2003045413A | 2003-02-14 | |||
| JP2001046918A | 2001-02-20 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
Patent business corporation Sakai international patent firm (JP)
Patent business corporation Sakai international patent firm (JP)
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