Title:
OBJECT COATED WITH TRANSPARENT CONDUCTIVE FILM AND PROCESS FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2010/090197
Kind Code:
A1
Abstract:
An object coated with a transparent conductive film and a process for producing same are provided in which a transparent conductive film having even film quality can be formed on a surface of a substrate even when the substrate is large or the transparent conductive film is thick.
A substrate (7) was stopped in a given first position relative to a target, and sputtering was conducted to form a thin ITO film in a given thickness. Thereafter, the substrate (7) was moved to a second position, which was different from the first position, and sputtering was performed while keeping the substrate (7) stationary. A second thin ITO film was thereby formed in a given thickness. Thus, an object coated with a transparent conductive film was obtained in which the transparent conductive film had been formed in such a state that the period of parts differing in film quality shifted in the thickness direction of the film.
Inventors:
DATE, Masahiro (())
Application Number:
JP2010/051464
Publication Date:
August 12, 2010
Filing Date:
February 03, 2010
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
International Classes:
C23C14/34; C23C14/08; G02F1/1343; H01B5/14; H01B13/00
Attorney, Agent or Firm:
UENO, Noboru (KS Iseya Building 8th Floor, 21-23 Sakae 3-chome, Naka-ku, Nagoya-sh, Aichi 08, 〒4600008, JP)
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