Title:
OBJECT CONVEYANCE APPARATUS, EXPOSURE APPARATUS, FLAT PANEL DISPLAY PRODUCTION METHOD, DEVICE PRODUCTION METHOD, OBJECT CONVEYANCE METHOD, AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2016/159062
Kind Code:
A1
Abstract:
This method for conveying a substrate (P) to a substrate holder (28) involves: using holding pads (84b) to hold a portion of the substrate (P) positioned above the substrate holder (28); and, when the holding of another portion of the substrate (P) by a substrate loading hand (62) for holding the other portion of the substrate (P) positioned above the substrate holder (28) is released, driving and controlling the holding pads (84b) holding the substrate (P) downwards such that the substrate (P) is supported on a support surface of the substrate holder (28). As a result, the substrate can be swiftly conveyed to the substrate holder.
Inventors:
AOKI YASUO (JP)
NAGASHIMA MASAYUKI (JP)
YAMANAKA TAKAHIRO (JP)
NAGASHIMA MASAYUKI (JP)
YAMANAKA TAKAHIRO (JP)
Application Number:
PCT/JP2016/060358
Publication Date:
October 06, 2016
Filing Date:
March 30, 2016
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F7/20; B65G49/06; H01L21/677
Foreign References:
| JP2011014784A | 2011-01-20 | |||
| JP2013051237A | 2013-03-14 | |||
| JP2012256027A | 2012-12-27 | |||
| JP2011228633A | 2011-11-10 |
Attorney, Agent or Firm:
TATEISHI, Atsuji (JP)
Tokuji Tateishi (JP)
Tokuji Tateishi (JP)
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