Title:
OBJECT HOLDING APPARATUS, PROCESSING APPARATUS, MANUFACTURING METHOD OF FLAT PANEL DISPLAY, MANUFACTURING METHOD OF DEVICE, AND OBJECT HOLDING METHOD.
Document Type and Number:
WIPO Patent Application WO/2018/181913
Kind Code:
A1
Abstract:
According to the present invention, a substrate stage device (20) is provided with: a fine movement stage (22) having an upper surface part (104) and a lower surface part (102), wherein the upper surface part (104) holds a substrate (P) and is parallel to a predetermined plane including the X-axis direction and the Y-axis direction, and the lower surface part (102) faces the upper surface part with respect to the Z-axis direction; and an X voice coil motor (70X) which overlaps the upper surface part and the lower surface part with respect to the X-axis direction and the Y-axis direction, is disposed to be sandwiched between the upper surface part and the lower surface part with respect to the Z-axis direction, and drives the fine movement stage.
Inventors:
AOKI YASUO (JP)
YOSHIDA RYOHEI (JP)
YOSHIDA RYOHEI (JP)
Application Number:
PCT/JP2018/013657
Publication Date:
October 04, 2018
Filing Date:
March 30, 2018
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F7/20; H01L21/68
Domestic Patent References:
| WO2016190423A1 | 2016-12-01 |
Foreign References:
| JP2013051289A | 2013-03-14 | |||
| JP2013217950A | 2013-10-24 | |||
| JP2011244608A | 2011-12-01 | |||
| JP2013538434A | 2013-10-10 |
Attorney, Agent or Firm:
TATEISHI, Atsuji (JP)
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