Title:
OBJECT REPLACEMENT DEVICE, OBJECT PROCESSING DEVICE, PRODUCTION METHOD FOR FLAT PANEL DISPLAY, DEVICE PRODUCTION METHOD, OBJECT REPLACEMENT METHOD, AND OBJECT PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/180969
Kind Code:
A1
Abstract:
In order to shorten the time required for substrate replacement, this object replacement device comprises: a first support unit (68) that supports a first surface of an object (P1); a second support unit (152) that receives the object from the first support unit and supports a second surface differing to the first surface of the object; and a drive unit (43) that drives the first support unit (68), that has handed over the object to the second support unit, to an object replacement position at which an object (P2) different from the object is brought to the first support unit.
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Inventors:
AOKI YASUO (JP)
USHIJIMA YASUYUKI (JP)
USHIJIMA YASUYUKI (JP)
Application Number:
PCT/JP2018/011656
Publication Date:
October 04, 2018
Filing Date:
March 23, 2018
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F7/20; B65G49/06; H01L21/677; H01L21/68
Domestic Patent References:
| WO2014024483A1 | 2014-02-13 | |||
| WO2013031222A1 | 2013-03-07 |
Foreign References:
| JP2012060134A | 2012-03-22 | |||
| JP2012237914A | 2012-12-06 | |||
| JP2012256027A | 2012-12-27 |
Attorney, Agent or Firm:
KATAYAMA, Shuhei (JP)
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