Title:
OBJECT TO BE TREATED INTRODUCTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/020681
Kind Code:
A1
Abstract:
An object to be treated introduction device for introducing an object to be treated in an air-tight state from the outside to the inside of a treatment device (F1) which treats the object to be treated in the air-tight state is provided with: an object to be treated storage unit (11) having an openable and closable storage port (111c) which is capable of temporarily storing the object to be treated and which is used when the object to be treated is stored; an object to be treated passageway (12) through which the object to be treated which is introduced to the inside of the treatment device (F1) can pass in the air-tight state; and a conveying unit (1b) having an object to be treated removal mechanism (13) capable of removing the object to be treated in the air-tight state from the object to be treated storage unit (11) to the object to be treated passageway (12). The conveying unit (1b) is provided with: a closed section (14) capable of air-tightly blocking between the treatment device side and object to be treated storage unit side of the conveying unit (1b); and a joint section (15) capable of separating and joining the conveying unit (1b) at a position closer to the object to be treated storage unit side than the closed section (14) of the conveying unit (1b).
Inventors:
NAKAMURA TAKAYA (JP)
YADA TAKASHI (JP)
MIYATA HIDETAKA (JP)
HANEDA NORIYUKI (JP)
OIKAWA SHIGERU (JP)
KOUKETSU AKIRA (JP)
NAKANO KATSUHIKO (JP)
KAWAI MITSUO (JP)
OCHI YOSHIFUMI (JP)
YADA TAKASHI (JP)
MIYATA HIDETAKA (JP)
HANEDA NORIYUKI (JP)
OIKAWA SHIGERU (JP)
KOUKETSU AKIRA (JP)
NAKANO KATSUHIKO (JP)
KAWAI MITSUO (JP)
OCHI YOSHIFUMI (JP)
Application Number:
PCT/JP2011/067774
Publication Date:
February 16, 2012
Filing Date:
August 03, 2011
Export Citation:
Assignee:
SINFONIA TECHNOLOGY CO LTD (JP)
NAKAMURA TAKAYA (JP)
YADA TAKASHI (JP)
MIYATA HIDETAKA (JP)
HANEDA NORIYUKI (JP)
OIKAWA SHIGERU (JP)
KOUKETSU AKIRA (JP)
NAKANO KATSUHIKO (JP)
KAWAI MITSUO (JP)
OCHI YOSHIFUMI (JP)
NAKAMURA TAKAYA (JP)
YADA TAKASHI (JP)
MIYATA HIDETAKA (JP)
HANEDA NORIYUKI (JP)
OIKAWA SHIGERU (JP)
KOUKETSU AKIRA (JP)
NAKANO KATSUHIKO (JP)
KAWAI MITSUO (JP)
OCHI YOSHIFUMI (JP)
International Classes:
F27D3/10; C30B15/02; C30B29/06; F27B14/04; F27B14/16
Foreign References:
| JPS63194296U | 1988-12-14 | |||
| JPH07133987A | 1995-05-23 | |||
| JPS6211169U | 1987-01-23 | |||
| JPH0712897U | 1995-03-03 |
Attorney, Agent or Firm:
FUJIMOTO, NOBORU (JP)
Noboru Fujimoto (JP)
Noboru Fujimoto (JP)
Download PDF:
Claims:
Previous Patent: SEPARATION MEMBRANE ELEMENT AND METHOD FOR PRODUCING COMPOSITE SEMIPERMEABLE MEMBRANE
Next Patent: CRYSTALLINE SILICON SOLAR CELL
Next Patent: CRYSTALLINE SILICON SOLAR CELL