Title:
OBJECT TRANSFER APPARATUS AND PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/044505
Kind Code:
A1
Abstract:
This object transfer apparatus is provided with: a first member having a first surface; a second member which is provided so as to be able to move within a second surface that is spaced away from the first surface in a first direction; a levitation member which is provided to the second member and which causes the second member to levitate above the first surface; a movement device which has a movement member capable of moving in a second direction that intersects with the first direction; and a coupling member which couples the movement member and the second member, wherein the rigidity of the coupling member in the first direction is less than that in a direction parallel to the second surface.
Inventors:
TATSUZAKI YOSUKE (JP)
Application Number:
PCT/JP2019/034507
Publication Date:
March 11, 2021
Filing Date:
September 03, 2019
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B23Q1/38; B23K26/08; B23Q1/62
Foreign References:
| JP2016002610A | 2016-01-12 | |||
| JP2016026881A | 2016-02-18 | |||
| JP2016166924A | 2016-09-15 | |||
| JP2015196222A | 2015-11-09 | |||
| JP2007266585A | 2007-10-11 |
Attorney, Agent or Firm:
EGAMI, Tatsuo (JP)
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