OBJECTIVE LENS FOR CORRECTING DISTRIBUTION STATE OF OPTICAL FOCUS POINTS IN BEAM PROPAGATION DIRECTION

WIPO Patent Application WO/2022/142250

A1

An objective lens for correcting the distribution state of optical focus points in a beam propagation direction. The objective lens comprises a first lens (1), a second lens (2), a third lens (3), a fourth lens (4), a fifth lens (5), a sixth lens (6) and a seventh lens (7), which are sequentially arranged in an incident beam direction, wherein a biconcave lens is used as the first lens (1); a plano-convex lens is used as the second lens (2); a biconvex lens is used as the third lens (3); a convex-plano lens is used as the fourth lens (4); a meniscus lens is used as the fifth lens (5) and the sixth lens (6); and a plano-plano lens is used as the seventh lens (7). The designed objective lens can correct the distribution state of the optical focus points in the beam propagation direction, so as to make light spot energy and the energy concentration of focused light spots at different positions consistent, thereby ensuring the processing precision.

WO/2010/148272	EXTREME BROADBAND COMPACT OPTICAL SYSTEM WITH MULTIPLE FIELDS OF VIEW
JP2010039347	PROJECTION EXPOSURE APPARATUS
JPH06303469	LENS DEVICE FOR TELEVISION CAMERA

WANG XUEHUI (CN)
WEN BIN (CN)
LI ZENGZHUO (CN)
WANG JIANGANG (CN)

PCT/CN2021/104867

July 07, 2022

July 07, 2021

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WUHAN HGLASER ENG CO LTD (CN)

G02B15/02; G02B7/04

CN112305726A	2021-02-02
CN109445062A	2019-03-08
CN104813214A	2015-07-29
CN108181699A	2018-06-19
CN106353879A	2017-01-25
JP2002162562A	2002-06-07
JP2019061184A	2019-04-18
JPH1010423A	1998-01-16
JP2006139164A	2006-06-01

NANJING ZONGHENG INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)

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