Title:
OBSERVATION DEVICE FOR GAS UNDER OBSERVATION, METHOD OF OBSERVING IONS UNDER OBSERVATION, AND SAMPLE HOLDER
Document Type and Number:
WIPO Patent Application WO/2021/251026
Kind Code:
A1
Abstract:
Provided are an observation device, an observation method for a gas under observation, and a sample holder that can be suitably used, with which a sample holder, onto which a thin-plate sample has been integrally installed, can be moved independently within an analysis chamber. This observation device is equipped with: a scanning electron microscope (15) for detecting secondary electrons produced by irradiating a sample (17) with an electron beam within an analysis chamber (11); a sample holder (12) that comprises a cell (12c) for accommodating a gas under observation and an opening window (W) of the cell (12c), and that also includes a sample loading section (12b) to which the sample (17) can be placed with the opening window (W) closed; and an ion-under-observation detection unit (20) for irradiating a front surface of the sample (17) with an electron beam in a state where the gas under observation of the cell (12c) is in contact with a reverse surface of the sample (17), and detecting ions under observation arising due to the gas under observation, the ions being produced by the electron beam. The entirety of a hydrogen cell (12c) can be sealed off in a state where the gas under observation is accommodated in the cell and the sample (17) is placed in the sample loading section (12b) of the sample holder.
Inventors:
NAKAMURA AKIKO (JP)
MURASE YOSHIHARU (JP)
MIYAUCHI NAOYA (JP)
YAKABE TARO (JP)
MURASE YOSHIHARU (JP)
MIYAUCHI NAOYA (JP)
YAKABE TARO (JP)
Application Number:
PCT/JP2021/017111
Publication Date:
December 16, 2021
Filing Date:
April 28, 2021
Export Citation:
Assignee:
NAT INST MATERIALS SCIENCE (JP)
International Classes:
H01J37/20; G01N1/28; G01N23/2202; G01N23/2204; G01N23/2251
Domestic Patent References:
| WO2012046775A1 | 2012-04-12 | |||
| WO2019226661A1 | 2019-11-28 |
Foreign References:
| JP2019145255A | 2019-08-29 | |||
| JPH06241978A | 1994-09-02 | |||
| JP2019045410A | 2019-03-22 | |||
| JPS5763254U | 1982-04-15 | |||
| JP2014089799A | 2014-05-15 | |||
| JP2017187457A | 2017-10-12 | |||
| JP2019145255A | 2019-08-29 |
Other References:
MIYAUCHI, NAOYA ET AL.: "Observation of Metal Surface by Operando Hydrogen Microscope", VACUUM AND SURFACE SCIENCE, vol. 62, no. 1, January 2019 (2019-01-01), pages 27 - 32, XP055890512, DOI: https://doi.org/10.1380/vss62.27
ITAKURA AKIKO: "Visualizing the movement of hydrogen -Development of an operando hydrogen microscope", WE-COM MAGAZIN, JAPAN WELDING ENGINEERING SOCIETY, vol. 37, no. 1, 1 July 2020 (2020-07-01), pages 1 - 12, XP055957676
AKIKO N. ITAKURAYOSHIHARU MURASEMASAHIRO TOSASHINJI SUZUKISHOJI TAKAGITETSUJI GOTOH: "Effect of Surface Processing on Hydrogen Desorption from Stainless Steel to UHV", J. VAC. SOC. JPN, vol. 57, no. 1, 2014, pages 23 - 26, XP055853181
NAOYA MIYAUCHISHINJI SUZUKISHOJI TAKAGITETSUJI GOTOHYOSHIHARU MURASEAKIKO N. ITAKURA: "Electron Stimulated Desorption Measurement of Permeated Hydrogen through Stainless Steel Membrane", J. VAC. SOC. JPN, vol. 58, no. 10, 2015, pages 31 - 35, XP055853199
ITAKURA AKIKO: "Visualizing the movement of hydrogen -Development of an operando hydrogen microscope", WE-COM MAGAZIN, JAPAN WELDING ENGINEERING SOCIETY, vol. 37, no. 1, 1 July 2020 (2020-07-01), pages 1 - 12, XP055957676
AKIKO N. ITAKURAYOSHIHARU MURASEMASAHIRO TOSASHINJI SUZUKISHOJI TAKAGITETSUJI GOTOH: "Effect of Surface Processing on Hydrogen Desorption from Stainless Steel to UHV", J. VAC. SOC. JPN, vol. 57, no. 1, 2014, pages 23 - 26, XP055853181
NAOYA MIYAUCHISHINJI SUZUKISHOJI TAKAGITETSUJI GOTOHYOSHIHARU MURASEAKIKO N. ITAKURA: "Electron Stimulated Desorption Measurement of Permeated Hydrogen through Stainless Steel Membrane", J. VAC. SOC. JPN, vol. 58, no. 10, 2015, pages 31 - 35, XP055853199
Attorney, Agent or Firm:
HIRAYAMA Kazuyuki (JP)
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