Title:
OBSERVATION DEVICE USING LIGHT AND X−RAY, EXPOSURE SYSTEM AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2002/097366
Kind Code:
A1
Abstract:
An X−ray (5a) beamed onto a substrate (15) serving as a circuit board forms a fluorescent image as an alignment mark of the substrate (15) on a scintillator film (19). A visible ray (21a) shone onto a mask substrate (17) forms a projection image as an alignment mark of the mask substrate (17) on the scintillator film (19). A CCD camera (6) picks up these images.
Inventors:
NAGAI TSUTOMU (JP)
SUZUKI TOMOYUKI (JP)
SUZUKI TOMOYUKI (JP)
Application Number:
PCT/JP2002/005083
Publication Date:
December 05, 2002
Filing Date:
May 24, 2002
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
NAGAI TSUTOMU (JP)
SUZUKI TOMOYUKI (JP)
NAGAI TSUTOMU (JP)
SUZUKI TOMOYUKI (JP)
International Classes:
G01B11/00; G01B15/00; G01T1/00; G01T1/20; G03F9/00; G21K5/00; G21K5/02; H01L21/027; H05K1/02; H05K3/00; (IPC1-7): G01B15/00; G01B11/00; H01L21/027
Foreign References:
| JPH11330710A | 1999-11-30 | |||
| JPS414235B1 | ||||
| JPH05322803A | 1993-12-07 | |||
| JPS62144325A | 1987-06-27 | |||
| JPS56126751A | 1981-10-05 | |||
| JPH04340514A | 1992-11-26 |
Attorney, Agent or Firm:
Hasegawa, Yoshiki (Okura-honkan 6-12, Ginza 2-chom, Chuo-ku Tokyo, JP)
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