Title:
OBSERVATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/125325
Kind Code:
A1
Abstract:
Provided is an observation device with which it is possible to observe an object surface of, for example, roughly 24.6x24.6mm, at a resolution of no more than 10 microns and at a large inclination angle which exceeds 45 degrees. An observation device 10 is provided with a light receiving surface 20 and an image forming optical system 30 for forming light from an object surface S into an image on the light receiving surface 20. The image forming optical system 30 includes a concave-surface primary mirror 32, a sub-mirror 34, and a flat extraction mirror 36. The beams of the light from the object surface S are reflected by the concave-surface primary mirror 32, the convex-surface sub-mirror 34, and the concave-surface primary mirror 32, in that order, and thereafter form an image on the light receiving surface 20 via the flat extraction mirror 36. The observation device 10 is provided with the following: a first tilting means which can change the angle α formed by the optical axis L1 of the light traveling from the object surface S towards the concave-surface primary mirror 32 and the perpendicular line N1 of the object surface S; and a second tilting means which can change the angle β formed by the optical axis L2 of the light traveling from the flat extraction mirror 36 towards the light receiving surface 20 and the perpendicular line N2 of the light receiving surface 20.
Inventors:
UEHARA MAKOTO (JP)
Application Number:
PCT/JP2015/070590
Publication Date:
August 11, 2016
Filing Date:
July 17, 2015
Export Citation:
Assignee:
MEJIRO GENOSSEN INC (JP)
International Classes:
G02B17/08; G02B21/00
Domestic Patent References:
| WO2005022614A1 | 2005-03-10 |
Foreign References:
| JP2013174844A | 2013-09-05 | |||
| JP2006196559A | 2006-07-27 | |||
| JP2001194803A | 2001-07-19 | |||
| JPH088169A | 1996-01-12 | |||
| JPH09230412A | 1997-09-05 |
Attorney, Agent or Firm:
TSUKUNI & ASSOCIATES et al. (JP)
Patent business corporation Tsukuni (JP)
Patent business corporation Tsukuni (JP)
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