Title:
OBSERVATION TARGET OBJECT COVER, CONTAINER FOR INTERFERENCE OBSERVATION, INTERFERENCE OBSERVATION DEVICE, AND INTERFERENCE OBSERVATION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/123791
Kind Code:
A1
Abstract:
This observation target object cover for performing an interference observation, using first light and second light having a greater coherence length than the first light, to acquire an interference light image of an observation target object by means of the first light, while adjusting an optical path length difference on the basis of an interference result of the second light, is provided with: a transmitting and reflecting portion which transmits the first light and reflects the second light; and a supporting portion which supports the transmitting and reflecting portion in such a way that a placement surface on which the observation target object is placed, and the transmitting and reflecting portion face one another with a prescribed gap therebetween.
Inventors:
YAMAUCHI TOYOHIKO (JP)
YAMADA HIDENAO (JP)
GOTO KENTARO (JP)
YAMADA HIDENAO (JP)
GOTO KENTARO (JP)
Application Number:
PCT/JP2018/037952
Publication Date:
June 27, 2019
Filing Date:
October 11, 2018
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G01N21/01; G01B9/02; G01N21/45; G02B21/00
Domestic Patent References:
| WO2011132586A1 | 2011-10-27 |
Foreign References:
| JP2011508241A | 2011-03-10 | |||
| JP2009122033A | 2009-06-04 | |||
| JP2013205253A | 2013-10-07 | |||
| US5923422A | 1999-07-13 | |||
| US20120250017A1 | 2012-10-04 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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