Title:
OFFSET CORRECTION SAMPLE AND FILM THICKNESS MEASURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2014/038404
Kind Code:
A1
Abstract:
An offset correction sample (70) is provided with a first offset detecting section (71) and a second offset detecting section (72). The first offset detecting section (71) is a section for obtaining the positional relationship between a camera (21) and a measuring head (23). The second offset detecting section (72) is a section for obtaining the positional relationship between the camera (21) and a displacement sensor (22).
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Inventors:
SAKAGAMI HIDEKAZU
HARADA NARUMI
YAMAWAKI CHIAKI
HARADA NARUMI
YAMAWAKI CHIAKI
Application Number:
PCT/JP2013/072579
Publication Date:
March 13, 2014
Filing Date:
August 23, 2013
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
G01B15/02; G01B11/00; G01B21/02
Foreign References:
| JPH04118508A | 1992-04-20 | |||
| JP2011047898A | 2011-03-10 | |||
| JP2011220794A | 2011-11-04 | |||
| JPH1183438A | 1999-03-26 | |||
| JP2009198485A | 2009-09-03 | |||
| JPS6157804A | 1986-03-24 | |||
| JP2005172610A | 2005-06-30 |
Attorney, Agent or Firm:
SAMEJIMA, Mutsumi et al. (JP)
Mutsumi Sameshima (JP)
Mutsumi Sameshima (JP)
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