Title:
ONLINE MEASUREMENT METHOD AND MEASUREMENT APPARATUS FOR RESIDUAL STRESS OF CONDUCTIVE THIN-FILM MATERIAL
Document Type and Number:
WIPO Patent Application WO/2018/035964
Kind Code:
A1
Abstract:
An online measurement method and measurement apparatus for a residual stress of a conductive thin-film material (1). The method comprises: using an electrostatic driving pull-in principle to design a measurement structure; using synchronous processing to control relevance between parameters of two measurement members (104-1, 104-2); by means of limiting relevant parameters of total strain energy of the two measurement members (104-1, 104-2), constraining a partial differential equation set of the total strain energy thereof; and by means of solving the partial differential equation set, obtaining unknown numerical values of residual stress σ0 and Young's modulus E of the two measurement members (104-1, 104-2).
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Inventors:
GU YIFAN (CN)
ZHOU ZAIFA (CN)
HUANG QINGAN (CN)
LI WEIHUA (CN)
ZHOU ZAIFA (CN)
HUANG QINGAN (CN)
LI WEIHUA (CN)
Application Number:
PCT/CN2016/104186
Publication Date:
March 01, 2018
Filing Date:
November 01, 2016
Export Citation:
Assignee:
UNIV SOUTHEAST (CN)
International Classes:
G01L5/00; G01N3/08
Domestic Patent References:
| WO2015184946A1 | 2015-12-10 |
Foreign References:
| CN102565143A | 2012-07-11 | |||
| CN101520385A | 2009-09-02 | |||
| CN104034574A | 2014-09-10 | |||
| CN104568586A | 2015-04-29 | |||
| CN104568585A | 2015-04-29 | |||
| US5847283A | 1998-12-08 | |||
| JPH06265428A | 1994-09-22 |
Attorney, Agent or Firm:
NANJING JINGWEI PATENT & TRADEMARK AGENCY CO., LTD (CN)
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