⁰⁵ first and second waveguides extending therefrom. A source of polarized light waves is simultaneously presented to the first and second waveguides. A pressure differential developed from a first pressure and a different second pressure of the environment acts on the crystal member to

¹⁰ deform the first and second waveguides. The deformation of the first and second waveguides modifies the polarized light waves to create first and second output waves. After the fundamental frequency of the first and second output waves are defined, an analyzer extracts the l-* difference in frequency and phase there between to provide an input to a computer where the frequency and phase difference is compared with a reference frequency and phase to define the current pressure and temperature of the environment.

^{2 ~} The conditions of an environment have been measured through the use of a plurality of sensors which communicate information in the form of electrical signals to an indicator through bundles of copper wires. However, these bundles need to be shielded from extraneous forces

²⁵ which can modify the electrical signals of the sensors. Recently various optic sensors, which are immune to electromagnetic interference, such as disclosed in U.S. Patents 4,598,996 and U.S. Patent Application 796,743 filed 11/25/1991 have been developed which use light

30 carried on glass fibers to prevent extraneous forces from affecting ourput of the sensors. In these sensors, modification of the light wave pattern carried by the glass fibers are analyzed to detect the temperature of an environment; more specifically, a fringe pattern

35 associated with light waves passing through birefringent crystals is decoded to determine the temperature in an environment. These sensors adequately detect temperature when used in an intended environment.

In evaluating the optic sensor disclosed in U.S. Patent Application 796,743 it was observed that the velocity of light waves propagating through a birefringent crystal could be shifted by an application of pressure to the crystal.

In the present invention, we have developed a sensor for use in an optic system having the capability of determining both pressure and temperature in a environment. The sensor has a crystal member made from a yttrium aluminum garnet substrate with epitaxial layers of holmium aluminum garnet located on the top and bottom surfaces thereof. The layers of holmium aluminum garnet form first and second waveguides which simultaneously receive polarized light waves from a source. A housing which supports the crystal member has a first chamber in communication with a first pressure and a second chamber in communication with an unknown pressure corresponding to the current pressure in the environment. The first pressure and unknown pressure develop a pressure differential which acts on the crystal member to produce a force which deforms the first and second waveguides. The deformation of the first and second waveguides correspondingly modify the polarized light waves to create first output waves in the first waveguide and second output waves in the second waveguide. The first and second output waves which are communicated to an optical interface member are analyzed to determine first and second fundamental frequencies and phase of the first and second output waves. The differences between the fundamental frequencies and phases of the fringe patterns of the first and second output waves indicate the pressure of the environment while the mean frequency and phase indicates the temperature of the environment.

It is an object of this invention to provide an optical system with a crystal member having integral first and second waveguides which simultaneously receive polarized light waves from a source, whereby the crystal member is responsive to a stress caused by changes in the

pressure of an environment which modify the polarized light waves to provide a detector and computing element with a signal from which current pressure of the environment is derived. It is an object of this invention to provide a sensor wherein the difference between the frequency and/or phase of the fringe pattern of light waves passing through first and second waveguides is used to indicate the pressure in an environment while the mean of the frequency and/or phase of the fringe pattern of light waves passing through first and second waveguides is used to indicate the temperature of the environment.

It is a further object of this invention to provide a system for measuring the pressure and temperature in an environment by analyzing output light waves derived from polarized light simultaneously presented to first and second waveguides of a birefringent crystal.

These objects and other advantages should be apparent from reading this specification while viewing the drawings wherein:

Figure 1 is a schematic illustration of an optic system having a sensor member made according to the present invention wherein a pressure differential acts on a crystal to deform first and second waveguides and modify first and second polarized light waves by birefringence to produce first and second output waves, the resulting differences of the frequency and/or phase of the fringe patterns of the first and second output waves indicate the pressure of the environment while the mean of the frequency and/or phase of the fringe patterns of the first and second output waves indicate the temperature of the environment;

Figure 2 is a sectional view of the crystal and waveguides of the sensor member of Figure 1;

Figure 3 is a top view of the crystal of Figure 2 Figure 4 is an illustration of a segment of the lattice structure of the crystal and waveguides;

Figure 5 is a stress diagram resulting from a pressure differential imposed on the crystal and waveguides; and

Figure 6 is a curve which represents the spectrum of the first and second output waves.

The optic system 10, shown in Figure 1, includes a sensor 19, illustrated in Figure 2, which generates first and second optical signals which are processed in an opto-electronic interface 11 to extract a fundamental frequency and/or phase which are analyzed in a central processing unit (CPU) 42 to indicate the current pressure and temperature of an environment in which the sensor 19 is located.

The optic system 10 shown in Figure 1 utilizes a broad band light spectrum, such a illustrated by curve 16, generated by source 14, such as a light emitting diode.

The broad band light spectrum, which is randomly polarized as depicted by 18, is transmitted through fiber optic cables 20a and 20.b to entrance connector 21 of sensor 19. The randomly polarized light presented to the connector 21 is communicated to a linear polarizer 22 in sensor 19. After passing through the linear polarizer 22, the light spectrum has a single plane of polarization, as depicted by 23. The linear polarizer 22 is connected to crystal member 30 to simultaneously present identical polarized light waves to a first entrance face 38 of a first waveguide 32 and a second entrance face 40 of a second waveguide 34. As the polarized light waves pass through the first 32 and second 34 waveguides, the first and second output waves are modulated and after passing through first 48 and second 50 exit faces are communicated to a second linear polarizer 46. The second linear polarizer 46 analyzes the first and second output light waves as deplicted by 18\' into first 116 and second 116\' light spectrums shown in Figure 6. The first 116 and second 116\' light spectrums are carried by optic cables 52 3 and 52.D to the opto-electronic interface 11 where prisms 90 and 95 direct the first 116 and second 116\'

light spectrums onto a lens grating assembly for focusing onto an array of photodetectors or a charge coupled detector device 91 and 96. The output of the detector devices 91 and 96 are presented to conditioning electronics 41 including a MUX, A/D, and DSP, where separate serial voltage streams are generated for the first 116 and second 116\' light spectrums. The serial voltage streams are analyzed in the conditioning electronics 41 where the frequency and phase difference between the streams and mean frequency and/or phase are determined to indicate the current pressure and temperature in the environment wherein sensor 19 is located and communicated to a host CPU 42. The accuracy of the information extracted from the first 116 and second 116\' light spectrums by the CPU 42 is dependent on the sensor 19, the particular structure of crystal member 30 and the design of the opto-electronic interface 11.

The sensor 19, as shown in Figure 2, includes a housing 56 which retains the first 22 and second 46 linear polarizers, crystal member 30 and inter connecting optic fibers 20a, 20.b, 52a„ and 52,b. The housing 56 has a cavity therein which is divided into a first chamber 58 and a second chamber 60 by the crystal member 30. A first seal 62 located in a groove 64 of housing 56 engages the first waveguide 32 and a second seal 66 located in groove 68 which prevents fluid communication between chambers 58 and 60. The crystal member 30 of sensor 19 can be con¬ sidered as a diaphragm rigidly supported and selectively displaced by a pressure differential between chambers 58 and 60. The first 32 and second 34 waveguides associated with crystal member 30 are subjected to the same bending stress induced on crystal member 30 by the pressure dif¬ ferential and being located on opposite sides or the top and bottom of core 36 function as beams. Thus, the magni- tude of stress will be the same but of opposite signs, that is one waveguide will be in tension while the other waveguide will be in compression, as shown in Figure 5.

In more detail, crystal member 30 is made up of, core member 36 with first 32 and second 34 waveguides attached thereto, see Figure 2 and 3. The core 36 is made of yttrium aluminum garnet (Y_Al _t -0 ₁₂ ) which has a lattice constant a, while the first 32 and second 34 waveguides are made of holmium aluminum garnet (Ho_Al _g O-,_) which has a different uniform lattice constant a_, as shown in Figure 4. The difference or mismatch of the lattice constants creates a strain which in turn results in a stress. The stress is defined by E, Youngs Modulus, and the induced strain. The stress can be calculated by the following equation -^ = E ^• £" , where (strain) ≤" = (a ₂ -a,)/a., . The strain in the first 32 and second 34 waveguides has been calculated and measured to be about 0.032%. This inherent stress induces birefringence into the first 32 and second 34 waveguides. It is this stress-induced birefringence that causes the fringe pattern shown in Figure 6 and it is the change in the fringe pattern as a function of pressure and temperature that is used to measure the pressure and temperature of the environment. For ease in manufacture, the first 32 and second 34 waveguides completely cover the core 36, however for some applications it may be desirable to limit the width "w" as shown by lines 70 and 70\', shown in Figure 3, and clad the first 32 and second 34 waveguides in the core member 36. It is anticipated that the first 32 and 34 waveguides could also be made from other materials which also have a functional equivalent lattice structure such as: (Tb,Lu)-,Al ^■ 5 _c O ^W 1.2\' (Tb,Yb) ₃ Al ₅ 0 ₁₂ (Tb,Tm) ₃ Al ₅ 0 ₁₂ (Tb,Er) ₃ Al ₅ 0 ₁₂ , (Tb,Er) ₃ Al ₅ 0 ₁₂

(Dy,Lu) ₃ Al ₅ 0 ₁₂ (Dy,Yb) ₃ Al ₅ 0 ₁₂ ,

(Dy,Tm) ₃ Al ₅ 0 ₁₂ (Dy,Er) ₃ Al ₅ 0 ₁₂ ,

(G ,Lu) ₃ Al ₅ 0 ₁₂ (Gd,Yb) ₃ Al ₅ 0 ₁₂

(Gd,Tm) ₃ Al ₅ 0 ₁₂ , (Gd Er) ₃ Al ₅ 0 ₁₂

(Y,Lu) ₃ (Sc,Al) ₅ 0 ₁₂ ; (Y,Yb) ₃ (Sc, A1) ₅ 0 ₁₂ ;

(Y,Tm) ₃ (Sc,Al) ₅ 0 ₁₂ ; (Y,Er) ₃ (Sc,A1) ₅ 0 ₁₂ ;

(Dy,Lu) ₃ (Sc,Al) ₅ 0 ₁₂ (Dy,Yb) ₃ (Sc,Al) ₅ 0 ₁₂ ,

(Dy,Tm) ₃ (Sc,Al) ₅ 0 ₁₂ (Dy,Er) ₃ (Sc,Al) ₅ 0 ₁₂

(Tb,Lu) ₃ (Sc,Al) ₅ 0 ₁₂ (Tb,Yb) ₃ (Sc,Al) ₅ 0 ₁₂

(Tb,Tm) ₃ (Sc,Al) ₅ 0 ₁₂ (Tb,Er) ₃ (Sc,Al) ₅ 0 ₁₂

(Gd,Lu) ₃ (Sc,Al) ₅ 0 ₁₂ , (Gd,Yb) ₃ (Sc,Al) ₅ 0 ₁₂

(Gd,Tm) ₃ (Sc,Al) ₅ 0 ₁₂ , (Gd,Er) ₃ (Sc,Al) ₅ 0 ₁₂

(Ca,Tb) ₃ (Si,Al) ₅ 0 ₁₂ , (Ca,Dy) ₃ (Si,Al) ₅ 0 ₁₂

(Ca,Gd) ₃ (Si,Al) ₅ 0 ₁₂ , (Cv-a»,,Y..),_.-(S->i.-.,,S.—c,,A--.l.*.)/ ₅ ,-0w ₁₂ ,

(Ca,Dy) ₃ (Si,Sc,Al) ₅ 0 ₁₂ ;

(Ca,Tb) ₃ (Si,Sc,Al) ₅ 0 ₁₂ ;

(Ca,Gd) ₃ (Si,Sc,Al) ₅ 0 ₁₂ ; (Ca, u) ₃ (Ge,Al) ₅ 0 ₁₂ ;

(Ca,Yb) ₃ (Ge,Al) ₅ 0 ₁₂ ; (Ca,Tm) ₃ (Ge,Al) ₅ 0 ₁₂ ; and

(Ca,Er) ₃ (Ge,Al) ₅ 0 ₁₂ .

The pressure differential that develops across crystal member 30 acts on, deforms and places a stress on the first 32 and second 34 waveguides in a manner as illustrated by the force diagram shown in Figure 5. Assuming the a first pressure (P, ) , for instance atmospheric pressure, is communicated to chamber 58 and an unknown pressure (P _χ ) is presented to chamber 60, then the resulting pressure differential (P- _ι - ^p _x ) acts on the crystal member 30 to cause a contraction on the top surface and an expansion on the bottom surface which theoretically decreases the length of the top waveguide 32 and increases the length of the bottom waveguide 34. In practice these length changes are negligible and can be disregarded. More importantly, the tangential stress that is introduced into crystal member 30 varies as a function of the unknown pressure (P ) and can be expressed according to the following equation:

( 1) .

where :

^P =W z= t/2; t= thickness of crystal member;

Ϋ= Poisson\'s Ratio; a= radius of pressure area; and r= radius of the crystal.

The stress induced into the first 32 and second 34 waveguides has an effect on the fringe pattern of the first 116 and second 116\' light spectrums which can be expressed as follows:

Where:

I = Initial (Excitation) Intensity Λ = wavelength; B = birefringence at = 0 and | = 0. dB/d ^* - = stress dependence of the birefringence; dB/dT = temperature dependence of the birefringence; Jt, = optical path length= 2r; and

T - temperature of the crystal member.;

The operation of the optic system 10 with a sensor 19 located in an environment where conditions are to be monitored and connected to the opto-electronic interface 11 by optic fibers 52 and 52. is as follows: The broad band light spectrum from source 14 is communicated through fiber optic cables 20 and 20, to

sensor 19 where the light waves are polarized and simultaneously communicated to the first 38 and second 40 entrance faces of the first 32 and second 34 waveguides.

The unknown pressure Px in the environment is communicated to chamber 60 and creates a pressure differential with the pressure P, in chamber 58. This pressure differential acts on the first 32 and second 34 waveguides to modify the light waves as they pass through the waveguides to create first and second output light waves that are communicated from the first 48 and second 50 exit faces to polarizer 46 and thereafter carried by optic cables 52 and 52, to the opto-electronic interface 11. The first and second output light waves are subjected to the same conditions of the environment by the bending stress induced on the first 32 and second 34 waveguides except one is positive and the other is negative. The output light waves are decomposed into their spectral components which are focused onto the array of linear photodetectors or CCD array(s) 91 and 96 and converted into separate first and second serial voltage streams. A critical function of the opto-electronic interface 11 is that each of the first and second output light waves must be read at the same time to develop meaningful information. If the first and second lightwaves are not read over the same interval of time the reading could be corrupted by dynamic changes in the differential pressure. The first and second serial voltage streams are converted into a digital format by the conditioning electronics 41 where a time domain to frequency domain transformation is performed to determine the fundamental frequency of the first and second serial voltage streams and difference in the relative phase at those frequencies, this type function is generically referred to as a Fast Fourier Transformation. Thereafter, the difference between the fundamental frequencies and difference in the phase are determined. These differences in fundamental frequencies and phase represent twice the stress in the first 32 and second 34 waveguides

caused by the difference between the unknown pressure P and the reference pressure P,. With the stress difference caused by pressure P now known it can be substituted into equation (2) and solved for the current temperature of the environment.