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Patent Searching and Data


Title:
OPTICAL APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/137699
Kind Code:
A1
Abstract:
Provided is an optical apparatus equipped with a center-shielding type projection optical system comprising a plurality of reflecting mirrors, wherein the shape of a pupil is roughly uniform at each of the points within an effective imaging area, and a good optical performance can be secured. The optical apparatus, which is provided with an optical system comprising a plurality of reflecting mirrors arranged between a first face and a second face, and forms an image of the first face on the second face, is also provided with an iris-diaphragm member for prescribing the external shape of luminous flux, and a shielding section for shielding a portion of the luminous flux. The iris-diaphragm member comprises an inner circumferential edge that has varying heights in the optical-axis direction of the optical system, and the shielding section comprises an outer circumferential edge that has varying heights in the optical-axis direction.

Inventors:
SHIRAISHI Masayuki (12-1 Yurakucho 1-chome, Chiyoda-k, Tokyo 31, 〒1008331, JP)
Application Number:
JP2012/058817
Publication Date:
October 11, 2012
Filing Date:
April 02, 2012
Export Citation:
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Assignee:
NIKON CORPORATION (12-1, Yurakucho 1-chome Chiyoda-k, Tokyo 31, 〒1008331, JP)
株式会社ニコン (〒31 東京都千代田区有楽町一丁目12番1号 Tokyo, 〒1008331, JP)
International Classes:
H01L21/027; G02B17/06; G03F7/20
Domestic Patent References:
WO2010032753A12010-03-25
WO2009121541A12009-10-08
WO2006001291A12006-01-05
Foreign References:
JP2005086148A2005-03-31
JP2004246343A2004-09-02
JP2001185480A2001-07-06
Attorney, Agent or Firm:
YAMAGUCHI Takao (Daiichi Bldg, 10 Kanda-tsukasacho 2-chome, Chiyoda-k, Tokyo 48, 〒1010048, JP)
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Claims: