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Title:
OPTICAL-COHERENCE-TOMOGRAPHY APPARATUS AND SURFACE-EMITTING LASER
Document Type and Number:
WIPO Patent Application WO/2016/002160
Kind Code:
A1
Abstract:
An optical-coherence-tomography apparatus includes a light-source unit configured to emit light while changing a wavelength of the light; an optical interferometric system configured to split the light from the light-source unit into illuminating light to be applied to an object and reference light, and to generate interfering light from the illuminating light reflected by the object and the reference light; a photodetection unit configured to receive the interfering light; and an information-acquiring unit configured to acquire information on the object from the interfering light received by the photodetection unit. The light-source unit performs wavelength sweep by displacing a movable portion with an electrostatic force generated with the application of a voltage. The optical-coherence-tomography apparatus further includes a pull-in-detection unit configured to detect whether or not a pull-in effect is occurring on the movable portion of the light-source unit.

Inventors:
HORI YUICHIRO (JP)
Application Number:
PCT/JP2015/003108
Publication Date:
January 07, 2016
Filing Date:
June 22, 2015
Export Citation:
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Assignee:
CANON KK (JP)
International Classes:
G01N21/17; G01N21/01; H01S5/022; H01S5/183
Domestic Patent References:
WO2014018950A12014-01-30
WO2014023777A22014-02-13
Foreign References:
JP2008046452A2008-02-28
Attorney, Agent or Firm:
ABE, Takuma et al. (30-2Shimomaruko 3-chome, Ohta-k, Tokyo 01, JP)
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