Title:
OPTICAL COMPONENT AND LASER MACHINING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/162616
Kind Code:
A1
Abstract:
This optical component (10) comprises a substrate (1) and a multilayer film (7). The multilayer film (7) is laminated on the substrate (1). The multilayer film (7) is composed of at least three layers in which an yttrium (III) fluoride film that is a fluoride film (4), a germanium (Ge) film (5), and a diamond-like carbon (DLC) film (6) are laminated in this order from the substrate (1) side. The optical component (10) makes it possible for infrared light to be transmitted at a high transmittance without using an oxide.
Inventors:
FUKUNAGA KEISUKE (JP)
Application Number:
PCT/JP2023/003425
Publication Date:
August 31, 2023
Filing Date:
February 02, 2023
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G02B1/14; B23K26/16
Domestic Patent References:
| WO2020153046A1 | 2020-07-30 | |||
| WO2019146500A1 | 2019-08-01 | |||
| WO2017195603A1 | 2017-11-16 | |||
| WO2016203863A1 | 2016-12-22 |
Foreign References:
| JPH04217202A | 1992-08-07 | |||
| JP2010181514A | 2010-08-19 | |||
| JP2014150219A | 2014-08-21 | |||
| JP2014086612A | 2014-05-12 | |||
| JP2002100590A | 2002-04-05 | |||
| JP2020516941A | 2020-06-11 | |||
| CN112859208A | 2021-05-28 | |||
| CN206916217U | 2018-01-23 |
Attorney, Agent or Firm:
TAKAMURA, Jun (JP)
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