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Title:
OPTICAL COMPONENT AND LASER PROCESSING MACHINE
Document Type and Number:
WIPO Patent Application WO/2019/146500
Kind Code:
A1
Abstract:
This optical component comprises: a substrate having a main surface and a second surface formed on the reverse surface from the main surface; and a multilayer film formed on the main surface and at least the main surface of the second surface, wherein the substrate is formed containing at least Ge, the multilayer film includes at least four layers. consisting of an oxide film, an amorphous fluoride film, a Ge film, and a DLC film stacked in this order from the side close to the substrate. Thus, the present invention can provide an optical component which has improved heat resistance, does not exhibit a deterioration in optical characteristics under the influence of heat, and exhibits stable optical performance.

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Inventors:
FUKUNAGA KEISUKE (JP)
MASUDA AKIO (JP)
Application Number:
PCT/JP2019/001327
Publication Date:
August 01, 2019
Filing Date:
January 17, 2019
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G02B1/14; B23K26/16; B32B9/00; B32B15/04
Domestic Patent References:
WO2017195603A12017-11-16
WO2016203863A12016-12-22
Foreign References:
JP2007212948A2007-08-23
JP2008268277A2008-11-06
US20150011068A12015-01-08
Attorney, Agent or Firm:
SOGA, Michiharu et al. (JP)
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