OPTICAL DEFLECTOR

WIPO Patent Application WO/2012/099112

A1

The present invention provides an optical deflector which has improved the durability of a movable part with respect to the load in the direction orthogonal to a mirror surface without impairing drive sensitivity. The optical deflector (100) is provided with a mirror unit (110) and an electrode substrate (140). The mirror unit (110) is provided with a movable part (112), a pair of compound torsion bars (114) and a pair of fixed parts (116). The pair of compound torsion bars (114) mechanically connects the movable part (112) with the fixed parts (116) such that the movable part (112) can be rotationally displaced around a rotational axis (118) or can have a tilt with respect to the fixed parts (116). Each compound torsion bar (114) is constituted by a plurality of torsion bars extending in parallel with the rotational axis (118) and a plurality of coupling bars mutually coupling one end of each pair of adjoining torsion bars. The plurality of torsion bars has higher torsional rigidity in the part distant from the rotational axis (118) than in the part near to the rotational axis (118).

KAMIYA YOSHITAKA (JP)
SAKATA YOSHITAKA (JP)

PCT/JP2012/050831

July 26, 2012

January 17, 2012

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OLYMPUS CORP (JP)
KAMIYA YOSHITAKA (JP)
SAKATA YOSHITAKA (JP)

G02B26/10; B81B3/00

JP2009080379A	2009-04-16
JP2006039067A	2006-02-09
JP2005517990A	2005-06-16
JP2008052220A	2008-03-06
JPH0646207A	1994-02-18

KURATA, Masatoshi et al. (JP)
Masatoshi Kurata (JP)

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