Title:
OPTICAL DEVICE, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2008/029852
Kind Code:
A1
Abstract:
An optical device holds an optical element arranged at the boundary between a
first space and a second space different from the first space. The optical device
comprises a holding member having a facing surface which faces a first surface
of the optical element, a bonding unit for bonding the facing surface and the first
surface, and a gas sealing mechanism for suppressing approach of at least one
of the gas of the first space and the gas of the second space to the bonding unit by
generating a gas flow between a facing surface and a surface of the optical element.
Inventors:
OKADA, Takaya (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
Application Number:
JP2007/067324
Publication Date:
March 13, 2008
Filing Date:
September 05, 2007
Export Citation:
Assignee:
NIKON CORPORATION (2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo, 31, 1008331, JP)
株式会社ニコン (〒31 東京都千代田区丸の内３丁目２番３号 Tokyo, 1008331, JP)
株式会社ニコン (〒31 東京都千代田区丸の内３丁目２番３号 Tokyo, 1008331, JP)
International Classes:
H01L21/027; G02B7/00; G03F7/20; H01L21/02; G02B7/00; G03F7/20
Attorney, Agent or Firm:
SHIGA, Masatake et al. (2-3-1, Yaesu Chuo-k, Tokyo 53, 1048453, JP)