OPTICAL DEVICE, EXPOSURE DEVICE, AND METHOD FOR MANUFACTURING ARTICLE

Title:

OPTICAL DEVICE, EXPOSURE DEVICE, AND METHOD FOR MANUFACTURING ARTICLE

Document Type and Number:

WIPO Patent Application WO/2018/008364

Kind Code:

A1

Abstract:

Provided is an optical device capable of highly accurately correcting a shape by suppressing heat generated with shape correction of an optical element. An optical device (10) that deforms a reflecting surface (1a) of a mirror (1) has: a base plate (5) that is disposed by being separated from a rear surface (1b), i.e., the surface on the reverse side of the reflecting surface (1a); and a correction unit (2), which includes a mirror-side magnet (3) attached to the surface on the reverse side of the reflecting surface (1a), and a base-side magnet (4) that is disposed at a position in the base plate (5), said position facing the mirror-side magnet (3). The correction unit (2) corrects the shape of the reflecting surface (1a) by means of a repelling force or an attracting force generated by the mirror-side magnet (3) and the base-side magnet (4).

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Inventors:

SHIBATA YUGO (JP)
NAGANO KOUHEI (JP)

Application Number:

PCT/JP2017/022311

Publication Date:

January 11, 2018

Filing Date:

June 16, 2017

Export Citation:

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Assignee:

CANON KK (JP)

International Classes:

G02B7/185; G02B5/10; G02B7/00; G03F7/20

Foreign References:

JP2011119551A	2011-06-16
JP2014147169A	2014-08-14
JP2005004146A	2005-01-06
JP2015126037A	2015-07-06
JP2011530721A	2011-12-22

Attorney, Agent or Firm:

TAKAOKA, Ryoichi et al. (JP)

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