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Title:
OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2012/073086
Kind Code:
A8
Abstract:
An optical device may include: a first beam shaping unit configured to transform a first laser beam incident thereon into a second laser beam having an annular cross section; and a first focusing optical element for focusing the second laser beam in a first predetermined location so as to generate a Bessel beam.

Inventors:
MIZOGUCHI, Hakaru (400 Yokokurashinden,Oyama-sh, Tochigi 19, 32308, JP)
WAKABAYASHI, Osamu (25-1 Shinomiya 3-chome,Hiratsuka-sh, Kanagawa 55, 25485, JP)
Application Number:
IB2011/002794
Publication Date:
March 14, 2013
Filing Date:
November 23, 2011
Export Citation:
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Assignee:
GIGAPHOTON INC. (6-1 Otemachi 2-chome, Chiyoda-ku, Tokyo 4, 10000, JP)
MIZOGUCHI, Hakaru (400 Yokokurashinden,Oyama-sh, Tochigi 19, 32308, JP)
WAKABAYASHI, Osamu (25-1 Shinomiya 3-chome,Hiratsuka-sh, Kanagawa 55, 25485, JP)
International Classes:
G02B5/00; G02B17/08; G02B27/09; G03F7/20; H01L21/027; H01S3/00; H05G2/00
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