Title:
OPTICAL DEVICE, OPTICAL MACHINING DEVICE, MICROSCOPE DEVICE, AND SCANNING METHOD
Document Type and Number:
WIPO Patent Application WO/2024/058237
Kind Code:
A1
Abstract:
An optical device (10) of an optical machining device (1) includes: an optical fiber amplifier that amplifies pulsed light; a diffraction grating (12) that disperses, by a diffraction phenomenon, pulsed light (PL) output from the optical fiber amplifier; a collimator lens (13) that collimates the pulsed light (PL) scattered at the diffraction grating (12); and an objective lens (17) that condenses the pulsed light (PL) transmitted through the collimator lens (13). By changing the amplification rate of the optical fiber amplifier, the position at which time focus occurs is changed in the optical axis direction of the objective lens (17).
Inventors:
TOKUHISA AKIRA (JP)
Application Number:
PCT/JP2023/033478
Publication Date:
March 21, 2024
Filing Date:
September 14, 2023
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02B21/06; B23K26/082; G02B26/10; G02F1/365; H01S3/067; H01S3/10
Domestic Patent References:
| WO2019217846A1 | 2019-11-14 | |||
| WO2012135823A1 | 2012-10-04 |
Foreign References:
| JP2017056489A | 2017-03-23 |
Attorney, Agent or Firm:
OHNISHI, Shogo et al. (JP)
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