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Patent Searching and Data


Title:
OPTICAL DEVICE, MEASUREMENT DEVICE, JOINING SYSTEM, AND MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2019/111736
Kind Code:
A1
Abstract:
An optical device (2, 2A) according to an embodiment of the present invention is provided with: a light source (21b); a filter (201); a cooling mechanism (202); and a control unit (4a). The filter (201) allows light that is in a wavelength region and that is part of light emitted from the light source (21b), to pass therethrough. The cooling mechanism (202) cools the filter (201). The control unit (4a) controls the cooling mechanism (202) so as to adjust the wavelength region of the light which is allowed by the filter (201) to pass therethrough.

Inventors:
OTSUKA YOSHITAKA (JP)
TSURUTA SHIGETO (JP)
Application Number:
PCT/JP2018/043308
Publication Date:
June 13, 2019
Filing Date:
November 26, 2018
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G01N21/84; G01B11/00; G01N21/956; G02B5/20; H01L21/02; H01L21/66
Domestic Patent References:
WO2014007044A12014-01-09
WO2016190381A12016-12-01
Foreign References:
JPH1079551A1998-03-24
JP2009150777A2009-07-09
JP2016090410A2016-05-23
JP2011186182A2011-09-22
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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