OPTICAL DEVICE, MONITOR DEVICE, INVERSE DISPERSION DOUBLE SPECTROSCOPE, AND METHOD FOR CONTROLLING INVERSE DISPERSION DOUBLE SPECTROSCOPE

Title:

OPTICAL DEVICE, MONITOR DEVICE, INVERSE DISPERSION DOUBLE SPECTROSCOPE, AND METHOD FOR CONTROLLING INVERSE DISPERSION DOUBLE SPECTROSCOPE

Document Type and Number:

WIPO Patent Application WO/2004/063684

Kind Code:

A1

Abstract:

An optical device (for example, an inverse dispersion double spectroscope) using a chromatic dispersion element. The light inputted into the device or the light outputted from the device can be monitored without any loss of the amount of light on the optical path (i.e., the main optical path). The optical device comprises input means (11) for outputting the input light having a plurality of wavelength bands into a free space, collimator means (12) for outputting a parallel beam (L1) of light produced by collimating the input light, chromatic dispersion means (13) for producing a first diffracted light (L7) for output by subjecting the parallel light to at least one chromatic dispersion action, output means (18, 19) arranged on an extension of the output optical path where the first diffracted light (L7) is produced from the parallel light (L1) and adapted to output the first diffracted light, and monitor means (20, 21) for monitoring spectrum information on a second diffracted light (L8) produced in a direction deviated from the output optical path out of the lights produced by the respective chromatic dispersion actions.

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Inventors:

KATSUNUMA ATSUSHI (JP)
TAKAHASHI KOUZOU (JP)

Application Number:

PCT/JP2003/017042

Publication Date:

July 29, 2004

Filing Date:

December 26, 2003

Export Citation:

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Assignee:

NIKON CORP (JP)
KATSUNUMA ATSUSHI (JP)
TAKAHASHI KOUZOU (JP)

International Classes:

G01J3/18; G02B6/34; H04B10/114; H04J14/02; (IPC1-7): G01J3/18; G02B6/293; H04B10/12

Foreign References:

JP2001174331A	2001-06-29
JP2002196173A	2002-07-10
JP2001267672A	2001-09-28
JPH05281043A	1993-10-29
JPH08145795A	1996-06-07
JP2004037282A	2004-02-05

Attorney, Agent or Firm:

Furuya, Fumio (19-5 Nishishinjuku 1-Chom, Shinjuku-ku Tokyo, JP)

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