Title:
OPTICAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/009392
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide an optical device with which it is possible to suppress reductions in the movability performance of a movable mirror and suppress increases in the size of the device overall while increasing the size of a mirror surface of the movable mirror. This optical device (10) comprises a base (12) having a main surface, a movable mirror (11) having a mirror surface along a parallel surface that is parallel to the main surface, a first elastic support part (14) and a second elastic support part (15) that support the movable mirror so as to be capable of moving along a first direction perpendicular to the main surface, an actuator part (16) that moves the movable mirror along the first direction, and a first optical function part (17) that is disposed on one side of the movable mirror in a second direction perpendicular to the first direction. The first elastic support part (14) has a pair of first levers (141) that extend from the movable mirror (11) along the main surface on both sides of the first optical function part in a third direction perpendicular to the first direction and to the second direction. The length (A1) of each of the pair of first levers (141) in the second direction is greater than the shortest distance (D1) between the outer edge of the mirror surface (11a) and the edge of the first optical function part (17).
Inventors:
SUGIMOTO TATSUYA (JP)
SUZUKI TOMOFUMI (JP)
KOTANI KYOSUKE (JP)
SUZUKI TOMOFUMI (JP)
KOTANI KYOSUKE (JP)
Application Number:
PCT/JP2018/025634
Publication Date:
January 10, 2019
Filing Date:
July 06, 2018
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B26/00; B81B3/00; G01B9/02; G01J3/45
Foreign References:
| JP2006343481A | 2006-12-21 | |||
| JP2014235260A | 2014-12-15 | |||
| JP2011069954A | 2011-04-07 | |||
| JP2010184334A | 2010-08-26 | |||
| JP2004177543A | 2004-06-24 | |||
| JP2012184962A | 2012-09-27 | |||
| US20120099176A1 | 2012-04-26 | |||
| JP2012524295A | 2012-10-11 |
Other References:
See also references of EP 3650910A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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