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Title:
OPTICAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/009394
Kind Code:
A1
Abstract:
This optical device is provided with: an elastic support section for supporting a movable section so that the movable section is capable of moving along a first direction; a first comb electrode comprising a plurality of first comb teeth; and a second comb electrode comprising a plurality of second comb teeth. The elastic support section comprises a torsion bar extending along a second direction perpendicular to the first direction and a nonlinear relaxation spring connected between the torsion bar and the movable section. The nonlinear relaxation spring is configured so that when the movable section has moved in the first direction, the deformation amount of said nonlinear relaxation spring around the second direction becomes smaller than the deformation amount of the torsion bar around the second direction and the deformation amount of said nonlinear relaxation spring in a third direction perpendicular to the first direction and the second direction becomes larger than the deformation amount of the torsion bar in the third direction. First comb teeth and second comb teeth that are adjacent to each other face each other in the second direction.

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Inventors:
SUGIMOTO TATSUYA (JP)
SUZUKI TOMOFUMI (JP)
KOTANI KYOSUKE (JP)
Application Number:
PCT/JP2018/025636
Publication Date:
January 10, 2019
Filing Date:
July 06, 2018
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B26/00; B81B3/00; G01J3/45
Foreign References:
JP2010184334A2010-08-26
JP2007155965A2007-06-21
US20110090551A12011-04-21
JP2002326197A2002-11-12
JP2002524271A2002-08-06
Other References:
THILO SANDNERTHOMAS GRASSHOFFHARALD SCHENKANDREAS KENDA: "Out-of-plane translator MEMS actuator with extraordinary large stroke for optical path length modulation in miniaturized FTIR Spectrometers", SENSOR+TEST CONFERENCES 2011, PROCEEDINGSIRS2, pages 151 - 156
See also references of EP 3650919A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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