OPTICAL DEVICE - HAMAMATSU PHOTONICS KK

Title:

OPTICAL DEVICE

Document Type and Number:

WIPO Patent Application WO/2019/009403

Kind Code:

A1

Abstract:

In this optical device, a base and a movable part are formed from a semiconductor substrate having, provided in order from one side in a prescribed direction, a first semiconductor layer, an insulating layer, and a second semiconductor layer. The base is formed from the first semiconductor layer, the insulating layer, and the second semiconductor layer. The moveable part is provided with a placement part formed from the second semiconductor layer. An optical functional part is placed on the surface of the placement part at the one side. The first semiconductor layer which forms the base is thicker than the second semiconductor layer which forms the base. The surface of the base at the one side is positioned further towards the one side than the optical functional part.

Inventors:

SUZUKI TOMOFUMI (JP)
KOTANI KYOSUKE (JP)
SUGIMOTO TATSUYA (JP)
KURAMOTO YUTAKA (JP)
SHIBAYAMA KATSUMI (JP)
HOSOKAWA NOBURO (JP)

Application Number:

PCT/JP2018/025646

Publication Date:

January 10, 2019

Filing Date:

July 06, 2018

Export Citation:

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Assignee:

HAMAMATSU PHOTONICS KK (JP)

International Classes:

G02B26/00; B81B3/00; G01B9/02; G01J3/45; G02B7/198

Foreign References:

JP2007021044A	2007-02-01
JP2009042456A	2009-02-26
JP2008233405A	2008-10-02
JP2012242450A	2012-12-10
JP2001296483A	2001-10-26
US20020167730A1	2002-11-14
JP2012524295W

Other References: