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Patent Searching and Data


Title:
OPTICAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/097818
Kind Code:
A1
Abstract:
An optical device having first, second, third, and fourth movable comb electrodes that are arranged, when viewed from a first direction, between a first support section and a first end section on one side of a moveable section in a second direction, between a second support section and a second end section on the other side of the moveable section in the second direction, between a third support section and the first end section of the moveable section, and between a fourth support section and the second end section of the moveable section, respectively. The first and second support sections have a first beam section and a second beam section, respectively, that are formed so as to have the thickness thereof greater than the thickness of a first torsion bar. The third and fourth support sections have a third beam section and a fourth beam section, respectively, that are formed so as to have the thickness thereof greater than the thickness of a second torsion bar.

Inventors:
SUGIMOTO TATSUYA (JP)
SUZUKI TOMOFUMI (JP)
KOTANI KYOSUKE (JP)
Application Number:
JP2018/032760
Publication Date:
May 23, 2019
Filing Date:
September 04, 2018
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B26/08; B81B3/00; G02B26/10; H02N1/00
Foreign References:
JP2008083122A2008-04-10
US20120099176A12012-04-26
JP2009171394A2009-07-30
JP2014238581A2014-12-18
JP2012042666A2012-03-01
US20050194650A12005-09-08
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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