Title:
OPTICAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/057455
Kind Code:
A1
Abstract:
Provided is an optical device in which a two-dimensionally distributed sample, a single condenser lens, a dichroic mirror array in which a plurality of dichroic mirrors are arranged, and an area sensor are arranged in this order along the optical axis of the condenser lens, the direction in which the plurality of dichroic mirrors are arranged is perpendicular to the optical axis, and an image of a measurement area on the sample is measured by dividing the image into a plurality of images having different wavelength components on the area sensor. The dichroic mirror array is closer to the area sensor in comparison to the condenser lens.
Inventors:
ANAZAWA TAKASHI (JP)
Application Number:
PCT/JP2022/034453
Publication Date:
March 21, 2024
Filing Date:
September 14, 2022
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G02B21/36
Domestic Patent References:
| WO2017145231A1 | 2017-08-31 | |||
| WO2020075293A1 | 2020-04-16 |
Foreign References:
| JP2012242115A | 2012-12-10 | |||
| JP2010145161A | 2010-07-01 | |||
| JPH05258321A | 1993-10-08 | |||
| JPH0961738A | 1997-03-07 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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