Title:
OPTICAL ELEMENT ANGLE ADJUSTMENT DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/011953
Kind Code:
A1
Abstract:
This optical element angle adjustment device is provided with: a first hinge, i.e., an elastic hinge that connects a first plate and a second plate to each other; an optical element holding section attached to the first plate and/or the second plate; and a first adjustment screw for adjusting the tilt angle of the first plate and/or the second plate by applying a force in the direction in which the first hinge is closed. A first pressing member, which is slidably in contact with the first plate and/or the second plate, is provided at a first adjustment screw end portion in the axis direction of the first adjustment screw. A first pressing member-side contact section and/or a first hinge-side contact section, with which the first pressing member is in contact, is formed as a curved surface section having a curved surface shape.
Inventors:
NAGAHAMA KENSHIRO (JP)
WATANABE YUKIO (JP)
WATANABE YUKIO (JP)
Application Number:
PCT/JP2016/070884
Publication Date:
January 18, 2018
Filing Date:
July 14, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G02B7/00; G02B7/198; G03F7/20; H05G2/00
Foreign References:
| JPH054113U | 1993-01-22 | |||
| JP2010172838A | 2010-08-12 | |||
| JP2007247855A | 2007-09-27 | |||
| JPS4925953U | 1974-03-05 | |||
| JP2005273808A | 2005-10-06 | |||
| US8925409B2 | 2015-01-06 | |||
| JP2013251100A | 2013-12-12 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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