Title:
OPTICAL ELEMENT AND OPTICAL DEVICE, DEVICE FOR INSPECTING OPTICAL ELEMENT AND OPTICAL DEVICE, AND METHOD OF INSPECTING OPTICAL ELEMENT AND OPTICAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/104201
Kind Code:
A1
Abstract:
The invention facilitates detection of the presence and location of a foreign body. An optical device (2) is provided, on an optical window (23a) of a lid portion (23) which occludes an opening portion of an enclosure portion (22), with first and second reflection-preventing films (24, 25) which: allow passage of signal light employed by an optical element (21); have a reflection coefficient with respect to inspecting light that is higher than the reflection coefficient with respect to the signal light, where the wavelength of the inspecting light is different from that of the signal light; and have a reflection coefficient with respect to second inspecting light that is lower than the reflection coefficient with respect to first inspecting light.
Inventors:
IWATA KOICHIRO (JP)
Application Number:
PCT/JP2016/077655
Publication Date:
June 22, 2017
Filing Date:
September 20, 2016
Export Citation:
Assignee:
FUJIKURA LTD (JP)
International Classes:
G01N21/88; G01J1/00; G01J1/04; G01N21/90; G02B1/11; H01L31/0232
Foreign References:
| JP2000156809A | 2000-06-06 | |||
| JP2010539484A | 2010-12-16 | |||
| JP2001249047A | 2001-09-14 | |||
| JP2010152256A | 2010-07-08 | |||
| JP2015072241A | 2015-04-16 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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