OPTICAL ELEMENT, METHOD OF MANUFACTURING THE OPTICAL ELEMENT, OPTICAL SYSTEM, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING MICRO DEVICE

WIPO Patent Application WO/2003/040785

A1

An optical element capable of eliminating the effect of rotationally symmetrical double refraction remaining in an optical system using a double refractive crystal material such as fluorine, comprising a light transmitting member (1) and an annular member (2) having a thermal expansion coefficient different from that of the light transmitting member and disposed on the outer peripheral side of the light transmitting member, the annular member (2) further comprising an inner ring (2a) fixed to the light transmitting member (2) and an outer ring (2b) connected to the inner ring through connection members (2c) having a flexibility in the radial direction thereof, wherein the light transmitting member is fixed to the annular member in the environment of a specified temperature different from the actual use temperature of the light transmitting member.

SHIBAZAKI YUICHI (JP)

PCT/JP2002/011478

May 15, 2003

November 01, 2002

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NIPPON KOGAKU KK (JP)
SHIBAZAKI YUICHI (JP)

G02B1/02; G02B7/02; G03F7/20; (IPC1-7): G02B5/30; G02B7/00; G02B7/02; G03F7/20; H01L21/027

JPH11153734A	1999-06-08
JP2000028886A	2000-01-28
JP2001141974A	2001-05-25
EP1081521A2	2001-03-07
JPH0875973A	1996-03-22
JPH08146276A	1996-06-07
JPH07191248A	1995-07-28
JP2001183564A	2001-07-06
JPH075352A	1995-01-10
JP2000331927A	2000-11-30
JP2001343576A	2001-12-14

Yamaguchi, Takao (10 Kanda-tsukasa-cho 2-chom, Chiyoda-ku Tokyo, JP)

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