Title:
OPTICAL-ELEMENT MOVING APPARATUS, NARROW-BAND LASER APPARATUS, AND ELECTRONIC-DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/111393
Kind Code:
A1
Abstract:
Provided is an optical-element moving apparatus provided with: a first holding part that holds a first optical element; a second holding part that holds a second optical element and that has an inclined surface that is inclined with respect to a first direction in which the inclined surface approaches the first holding part; a guide part that enables the second holding part to move parallel to the first direction; and an elastic member that is positioned at a position between the first holding part and the second holding part and through which a first plane that perpendicularly intersects the inclined surface and that is parallel to the first direction passes.
Inventors:
WATABE YOSHINOBU (JP)
KATO MASAHIDE (JP)
FURUSATO HIROSHI (JP)
KATO MASAHIDE (JP)
FURUSATO HIROSHI (JP)
Application Number:
PCT/JP2017/044076
Publication Date:
June 13, 2019
Filing Date:
December 07, 2017
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G02B7/02
Domestic Patent References:
WO2015133515A1 | 2015-09-11 | |||
WO2004006309A1 | 2004-01-15 |
Foreign References:
JPH11352012A | 1999-12-24 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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